Effects of deposition parameters on Cd1-xZnxTe films prepared by RF magnetron sputtering

Hong Cao; Jun Hao Chu; Shan Li Wang; Yun Hua Wu; Chuan Jun Zhang

doi:10.3724/SP.J.1010.2013.00097

Effects of deposition parameters on Cd_1-xZn_xTe films prepared by RF magnetron sputtering

Hong Cao^*
, Jun Hao Chu
, Shan Li Wang
, Yun Hua Wu
, Chuan Jun Zhang

^*此作品的通讯作者

CAS - Shanghai Institute of Technical Physics
Shanghai Center for Photovoltaics

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用（Scopus）

摘要

Cd_1-xZn_xTe films were deposited by RF magnetron sputtering from Cd_0.96Zn_0.04Te crystals target at different substrate temperatures, RF powers and working pressures. After deposition, the samples were annealed in high purity air at 473 K. The films were characterized using step profilometer, UV-VIS-NIR spectrophotometer, XRD and SEM. Depending on the deposition parameters and annealing, the values of the band gap of the CZT films varied between 1.45 and 2.02 eV.

源语言	英语
页（从-至）	97-101
页数	5
期刊	Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
卷	32
期	2
DOI	https://doi.org/10.3724/SP.J.1010.2013.00097
出版状态	已出版 - 4月 2013
已对外发布	是

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@article{ede6493823fb4ffda6192bfd7abf96fb,

title = "Effects of deposition parameters on Cd1-xZnxTe films prepared by RF magnetron sputtering",

abstract = "Cd1-xZnxTe films were deposited by RF magnetron sputtering from Cd0.96Zn0.04Te crystals target at different substrate temperatures, RF powers and working pressures. After deposition, the samples were annealed in high purity air at 473 K. The films were characterized using step profilometer, UV-VIS-NIR spectrophotometer, XRD and SEM. Depending on the deposition parameters and annealing, the values of the band gap of the CZT films varied between 1.45 and 2.02 eV.",

keywords = "Band gap, CdZnTe, RF magnetron sputtering, Thin films",

author = "Hong Cao and Chu, \{Jun Hao\} and Wang, \{Shan Li\} and Wu, \{Yun Hua\} and Zhang, \{Chuan Jun\}",

year = "2013",

month = apr,

doi = "10.3724/SP.J.1010.2013.00097",

language = "英语",

volume = "32",

pages = "97--101",

journal = "Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves",

issn = "1001-9014",

publisher = "Chinese Optical Society",

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}

TY - JOUR

T1 - Effects of deposition parameters on Cd1-xZnxTe films prepared by RF magnetron sputtering

AU - Cao, Hong

AU - Chu, Jun Hao

AU - Wang, Shan Li

AU - Wu, Yun Hua

AU - Zhang, Chuan Jun

PY - 2013/4

Y1 - 2013/4

N2 - Cd1-xZnxTe films were deposited by RF magnetron sputtering from Cd0.96Zn0.04Te crystals target at different substrate temperatures, RF powers and working pressures. After deposition, the samples were annealed in high purity air at 473 K. The films were characterized using step profilometer, UV-VIS-NIR spectrophotometer, XRD and SEM. Depending on the deposition parameters and annealing, the values of the band gap of the CZT films varied between 1.45 and 2.02 eV.

AB - Cd1-xZnxTe films were deposited by RF magnetron sputtering from Cd0.96Zn0.04Te crystals target at different substrate temperatures, RF powers and working pressures. After deposition, the samples were annealed in high purity air at 473 K. The films were characterized using step profilometer, UV-VIS-NIR spectrophotometer, XRD and SEM. Depending on the deposition parameters and annealing, the values of the band gap of the CZT films varied between 1.45 and 2.02 eV.

KW - Band gap

KW - CdZnTe

KW - RF magnetron sputtering

KW - Thin films

UR - https://www.scopus.com/pages/publications/84877653084

U2 - 10.3724/SP.J.1010.2013.00097

DO - 10.3724/SP.J.1010.2013.00097

M3 - 文章

AN - SCOPUS:84877653084

SN - 1001-9014

VL - 32

SP - 97

EP - 101

JO - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

JF - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

IS - 2

ER -

Effects of deposition parameters on Cd1-xZnxTe films prepared by RF magnetron sputtering

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Effects of deposition parameters on Cd_1-xZn_xTe films prepared by RF magnetron sputtering