@inproceedings{850c6162040748a6b381eae892d9f242,
title = "Effect of Si, F implantation on the formation and light emitting properties of porous silicon",
abstract = "The effect of ion implantation on the formation and light emitting properties of porous silicon is reported. Si+, F+ ions were implanted into silicon wafers before electrochemical etching process. The experiments showed that porous structure can be formed on the wafer containing amorphous layer, while the porosity distribution with the depth changed greatly compared with the anodized crystalline Si. The implantation of F+ ions greatly affects the formation mechanism. The creation of point defects leads to red-shift in photoluminescence measurements.",
author = "Lianwei Wang and Chenglu Lin and Ping Liu and Zuyao Zhou and Shichang Zou",
year = "1994",
language = "英语",
isbn = "1558992154",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "445--450",
editor = "Garito, \{Anthony F.\} and Jen, \{Alex K-Y.\} and Lee, \{Charles Y-C.\} and Dalton, \{Larry R.\}",
booktitle = "Materials Synthesis and Processing Using Ion Beams",
note = "Proceedings of the MRS 1993 Fall Meeting ; Conference date: 29-11-1993 Through 03-12-1993",
}