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Effect of acetic acid/water ratio on the microstructure and properties of LaNiO3 thin films by metal organic solution deposition

  • Yuan Yuan Zhang*
  • , Xiao Dong Tang
  • , Gen Shui Wang
  • , Xian Lin Dong
  • *此作品的通讯作者
  • East China Normal University
  • CAS - Shanghai Institute of Ceramics

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Highly (100)-oriented LaNiO3 (LNO) thin films were prepared on p-type Si (100) substrates by metal organic solution deposition (MOSD). The LNO thin films were driven by series precursor solutions with different ratio of acetic acid to deionized water (Raaw) and pH values. The dependences of viscosity, pH value and the thermal property of the gel-derived powders of the precursor solution on Raaw values were systematically investigated. AFM images showed that Raaw can dramatically influence the surface roughness. When Raaw changed from 7:1 to 1:1, the surface roughness decreased from 3.695 nm to 1.488 nm. The resistivities of all the films are less than 2.1×10-3Ω·cm. It shows that the precursor solution has strong effect on the microstructure of the thin films and relatively slight effect on the resistivity.

源语言英语
主期刊名Advanced Functional Materials
编辑Yafang Han, Zhongwei Gu, Qiang Fu
出版商Trans Tech Publications Ltd
89-93
页数5
ISBN(电子版)9783038353942
DOI
出版状态已出版 - 2015
活动Chinese Materials Congress, CMC 2014 - Chengdu, 中国
期限: 4 7月 20147 7月 2014

出版系列

姓名Materials Science Forum
815
ISSN(印刷版)0255-5476
ISSN(电子版)1662-9752

会议

会议Chinese Materials Congress, CMC 2014
国家/地区中国
Chengdu
时期4/07/147/07/14

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