Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

Fei He; Ya Cheng; Zhizhan Xu; Yang Liao; Jian Xu; Haiyi Sun; Chen Wang; Zenghui Zhou; Koji Sugioka; Katsumi Midorikawa; Yonghao Xu; Xianfeng Chen

doi:10.1364/OL.35.000282

Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

Fei He^*
, Ya Cheng
, Zhizhan Xu
, Yang Liao
, Jian Xu
, Haiyi Sun
, Chen Wang
, Zenghui Zhou
, Koji Sugioka
, Katsumi Midorikawa
, Yonghao Xu
, Xianfeng Chen

^*此作品的通讯作者

CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
RIKEN
Shanghai Jiao Tong University

科研成果: 期刊稿件 › 文章 › 同行评审

91 引用（Scopus）

摘要

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

源语言	英语
页（从-至）	282-284
页数	3
期刊	Optics Letters
卷	35
期	3
DOI	https://doi.org/10.1364/OL.35.000282
出版状态	已出版 - 1 2月 2010
已对外发布	是

访问文件

10.1364/OL.35.000282

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{fb8badeca3cb49efb9d742f6807d16c1,

title = "Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser",

abstract = "We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.",

author = "Fei He and Ya Cheng and Zhizhan Xu and Yang Liao and Jian Xu and Haiyi Sun and Chen Wang and Zenghui Zhou and Koji Sugioka and Katsumi Midorikawa and Yonghao Xu and Xianfeng Chen",

year = "2010",

month = feb,

day = "1",

doi = "10.1364/OL.35.000282",

language = "英语",

volume = "35",

pages = "282--284",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "Optica Publishing Group (formerly OSA)",

number = "3",

}

TY - JOUR

T1 - Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

AU - He, Fei

AU - Cheng, Ya

AU - Xu, Zhizhan

AU - Liao, Yang

AU - Xu, Jian

AU - Sun, Haiyi

AU - Wang, Chen

AU - Zhou, Zenghui

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

AU - Xu, Yonghao

AU - Chen, Xianfeng

PY - 2010/2/1

Y1 - 2010/2/1

N2 - We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

AB - We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

UR - https://www.scopus.com/pages/publications/75749145114

U2 - 10.1364/OL.35.000282

DO - 10.1364/OL.35.000282

M3 - 文章

C2 - 20125695

AN - SCOPUS:75749145114

SN - 0146-9592

VL - 35

SP - 282

EP - 284

JO - Optics Letters

JF - Optics Letters

IS - 3

ER -

Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

摘要

访问文件

其它文件与链接

学术指纹

引用此