Dielectrophoresis of nano-materials and application to fabrication of micro-/nano-sensor

One of the key problems of nano-structured materials for electronic device applications in micro-/ nano-sensors and circuits is to align and manipulate them to the preset locations. With several home-made electrode pairs, we succeeded in manipulating the SiO₂ micro-/nano-particles along the electric field and deposited them across the gaps between two electrodes. It is proven a helpful experiment to precisely assemble of the nano-structures. A relative humidity sensor, using the dielectrophoretically located self-grown ZnO nano-materials as sensing elements, had been fabricated and the sensing properties had been tested. It confirms the dielectrophoresis can fulfill the application of nano-materials in the field of sensors.