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Co-doping: An effective strategy for developing stable and high-speed Sb2Te-based phase-change memory

  • Jing Hu*
  • , Cong Lin
  • , Yan Cheng
  • , Yonghui Zheng
  • , Tao Wei
  • , Wanfei Li
  • , Yun Ling
  • , Qianqian Liu
  • , Miao Cheng
  • , Ruirui Wang
  • , Sannian Song
  • , Zhitang Song
  • , Yinghui Wei
  • , Bo Liu*
  • *此作品的通讯作者
  • Suzhou University of Science and Technology
  • CAS - Shanghai Institute of Microsystem and Information Technology
  • East China Normal University
  • Jiangsu Institute of Advanced Semiconductors

科研成果: 期刊稿件文章同行评审

摘要

Balancing operation speed and thermal stability is a big challenge in phase change memory (PCM). In this work, a carbon (C) and chromium (Cr) co-doped Sb2Te strategy has been proposed for achieving high operation speed and high stability in PCM applications. In general, doping with the appropriate Cr element is beneficial to improve thermal stability, but it will sacrifice its operation speed. C-doping can enhance thermal stability and retain its fast phase transition properties due to the carbon elements tend to form agglomerates in the host that ameliorate disorder of the amorphous phase without loss of the phase transition rate. Intriguingly, the as-prepared C1.19Cr0.23Sb2Te material exhibits good data retention (T10-year @ 155.0 °C) and low-volume change rate (1.8%), as well as fast switching speed (4 ns) and good endurance (>1 × 105 cycles). This research indicates that C and Cr co-doping is an effective method to achieve excellent stability of phase-change materials without sacrificing the phase-transition rate of Sb2Te materials.

源语言英语
文章编号222108
期刊Applied Physics Letters
122
22
DOI
出版状态已出版 - 29 5月 2023

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