Characterization of filtered cathodic vacuum arc system

Ion energy is known to be a crucial parameter in the determination of film properties deposited by filtered cathodic vacuum arc (FCVA) technique. In this paper, the effect of system parameters such as magnetic filtering current, duct bias voltage and arc current on the ion energy were investigated. The ion energy distribution at the exit of the duct was measured by a Faraday cup. Plasma floating potential and saturation current were also determined by langmuir and current probes, respectively. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model.