TY - CHAP
T1 - Basic Optics and Diagnostics Apparatus for Ultrashort Pulse Laser Micro-/Nanoprocessing
AU - Xu, Jian
AU - Cheng, Ya
AU - Sugioka, Koji
N1 - Publisher Copyright:
© Springer Nature Switzerland AG 2021. All rights are reserved.
PY - 2021/1/1
Y1 - 2021/1/1
N2 - With a significantly improved processing precision, quality, and flexibility in 3D space, ultrashort pulse laser processing at the micro-and nanoscales has exhibited superior performances in the fields of fundamental research and industrial manufacturing as compared with traditional long-pulse and continuous laser processing in the past decades. In this chapter, basic optics for ultrashort pulse laser micro-/nanoprocessing are introduced. Specifically, basic optical setups of two representative processing systems (3D ultrashort laser direct writing systems and laser parallel processing systems) are described as well as their crucial optical components. Recent advances of ultrashort laser micro-/nanoprocessing such as spatiotemporal beam shaping and homogenization of femtosecond laser pulses are presented. Moreover, typical diagnosis systems for ultrashort pulse laser processing such as basic optical setups for measurement of pulse durations and transient pump-probe imaging are briefly summarized.
AB - With a significantly improved processing precision, quality, and flexibility in 3D space, ultrashort pulse laser processing at the micro-and nanoscales has exhibited superior performances in the fields of fundamental research and industrial manufacturing as compared with traditional long-pulse and continuous laser processing in the past decades. In this chapter, basic optics for ultrashort pulse laser micro-/nanoprocessing are introduced. Specifically, basic optical setups of two representative processing systems (3D ultrashort laser direct writing systems and laser parallel processing systems) are described as well as their crucial optical components. Recent advances of ultrashort laser micro-/nanoprocessing such as spatiotemporal beam shaping and homogenization of femtosecond laser pulses are presented. Moreover, typical diagnosis systems for ultrashort pulse laser processing such as basic optical setups for measurement of pulse durations and transient pump-probe imaging are briefly summarized.
KW - Homogenization of femtosecond laser pulses
KW - Laser diagnosis
KW - Laser direct writing
KW - Laser parallel processing
KW - Pulse duration
KW - Pump-probe imaging
KW - Spatiotemporal beam shaping
KW - Ultrashort laser pulses
UR - https://www.scopus.com/pages/publications/85160143718
U2 - 10.1007/978-3-030-63647-0_8
DO - 10.1007/978-3-030-63647-0_8
M3 - 章节
AN - SCOPUS:85160143718
SN - 9783030636463
VL - 1
SP - 671
EP - 684
BT - Handbook of Laser Micro-and Nano-Engineering
PB - Springer International Publishing
ER -