Annealing process and mechanism of glass based VO₂ film from V oxidation in pure oxygen atmosphere

Vanadium oxidation method is a promising approach for industrial production of VO₂ thin film on glass. For this method, post-annealing process is vital to the formation and quality of VO₂ thin film. Annealing temperature, time, and oxygen pressure for preparing of large scale VO₂ films on glass were studied systematically in this work. The influence of V film thickness is studied as well. The results reveal that the best annealing parameters are significantly influenced by the thickness of V film. The mechanism of annealing oxidation process is discussed further. The oxidation process is dominated by the reaction-control rather than the diffusion-control. A 200 mm × 200 mm large area VO₂ film on glass substrate was successfully prepared through metal vanadium oxidation method for demonstration. It is a promising way for large scale fabrication of high performance smart energy-saving window.