@inproceedings{65a42d39ec1d4c0f97b647a3ef6d016d,
title = "Analysis of sigma-delta micro-mechanical accelerometer's parameters",
abstract = "Based on conventional 2nd-order and 4th-order closed-loop sigma-delta accelerometer (ΣΔ accelerometer) system models, an investigation into parameters that influence accelerometer's performance is presented, including lead compensation coefficient, mechanical resonant frequency and input signal. Moreover, effect of compensation coefficient under high Q is researched. The simulation results imply that an accelerometer system has an optimal compensation coefficient and its performance is inversely proportional to resonant frequency. And the system is conditionally stable under different input acceleration. By optimizing these parameters, a 4th-order sigma-delta accelerometer with 93dB SNDR can be achieved.",
keywords = "Compensation coefficient, Input signal, Micro-accelerometer, Resonant frequency, Sigma-delta",
author = "Lv Bingjun and Wang Pengfei and Li Zhi and Liu Xiaowei and Liu Yuntao",
year = "2011",
doi = "10.1109/AISMOT.2011.6159370",
language = "英语",
isbn = "9781457707964",
series = "2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011",
pages = "267--271",
booktitle = "2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011",
note = "2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011 ; Conference date: 12-10-2011 Through 16-10-2011",
}