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Advancing integrated photonics and microreactor technologies with ultrafast laser processing

  • Min Wang
  • , Zhiwei Fang
  • , Jia Qi
  • , Junxia Zhou
  • , Zhe Wang
  • , Rongbo Wu
  • , Renhong Gao
  • , Ni Yao
  • , Sanaul Haque
  • , Saeed Farajollahi
  • , Jintian Lin
  • , Wei Fang
  • , Tao Lu
  • , Wei Chu
  • , Ya Cheng
  • East China Normal University
  • CAS - Shanghai Institute of Optics and Fine Mechanics
  • Zhejiang Lab
  • University of Victoria BC
  • Zhejiang University

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.

源语言英语
主期刊名Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI
编辑Carlos Molpeceres, Jie Qiao, Aiko Narazaki
出版商SPIE
ISBN(电子版)9781510641815
DOI
出版状态已出版 - 2021
活动Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI 2021 - Virtual, Online, 美国
期限: 6 3月 202111 3月 2021

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
11673
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI 2021
国家/地区美国
Virtual, Online
时期6/03/2111/03/21

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