Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Peng Wang; Wei Chu; Wenbo Li; Yuanxin Tan; Jia Qi; Yang Liao; Zhanshan Wang; Ya Cheng

doi:10.1364/OL.43.003485

Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Peng Wang
, Wei Chu
, Wenbo Li
, Yuanxin Tan
, Jia Qi
, Yang Liao
, Zhanshan Wang
, Ya Cheng

物理与电子科学学院

Tongji University
CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
ShanghaiTech University

科研成果: 期刊稿件 › 文章 › 同行评审

21 引用（Scopus）

摘要

We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional micro-processing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 μm and 9 mm without any aberration correction.

源语言	英语
页（从-至）	3485-3488
页数	4
期刊	Optics Letters
卷	43
期	15
DOI	https://doi.org/10.1364/OL.43.003485
出版状态	已出版 - 1 8月 2018

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abstract = "We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional micro-processing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 μm and 9 mm without any aberration correction.",

author = "Peng Wang and Wei Chu and Wenbo Li and Yuanxin Tan and Jia Qi and Yang Liao and Zhanshan Wang and Ya Cheng",

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AU - Wang, Peng

AU - Chu, Wei

AU - Li, Wenbo

AU - Tan, Yuanxin

AU - Qi, Jia

AU - Liao, Yang

AU - Wang, Zhanshan

AU - Cheng, Ya

PY - 2018/8/1

Y1 - 2018/8/1

N2 - We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional micro-processing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 μm and 9 mm without any aberration correction.

AB - We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional micro-processing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 μm and 9 mm without any aberration correction.

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Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

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