A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide

Jianqiao Hu; Furong Zhu; Jian Zhang; Hao Gong

doi:10.1016/S0925-4005(03)00186-2

A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide

Jianqiao Hu
, Furong Zhu
, Jian Zhang
, Hao Gong^*

^*此作品的通讯作者

Agency for Science, Technology and Research, Singapore
National University of Singapore

科研成果: 期刊稿件 › 会议文章 › 同行评审

54 引用（Scopus）

摘要

Nitric oxide (NO) gas sensor using a combination of indium tin oxide (ITO) and quartz crystal microbalance is fabricated. The sensor is made from the polished AT-cut quartz crystal on which the ITO thin film is deposited using radio frequency magnetron sputtering. The sensor is sensitive to NO gas at room temperature and avoids the problems related to elevated-temperature sensors. It is shown that the sensor has a distinct negative frequency shift of 110Hz within 600s when it is exposed to 60ppm of NO. The frequency-changing rate is also found to increase with NO concentration. The chemical status of elements on the ITO surface before and after NO adsorption is investigated by X-ray photoelectron spectroscopy (XPS). Possible gas sensing mechanisms are discussed.

源语言	英语
页（从-至）	175-180
页数	6
期刊	Sensors and Actuators B: Chemical
卷	93
期	1-3
DOI	https://doi.org/10.1016/S0925-4005(03)00186-2
出版状态	已出版 - 1 8月 2003
已对外发布	是
活动	Proceedings of the Ninth International Meeting on Chemical Engineering - Boston, MA, 美国期限: 7 7月 2003 → 10 7月 2003

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@article{073bc0ace9904a9584c2192126a65544,

title = "A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide",

abstract = "Nitric oxide (NO) gas sensor using a combination of indium tin oxide (ITO) and quartz crystal microbalance is fabricated. The sensor is made from the polished AT-cut quartz crystal on which the ITO thin film is deposited using radio frequency magnetron sputtering. The sensor is sensitive to NO gas at room temperature and avoids the problems related to elevated-temperature sensors. It is shown that the sensor has a distinct negative frequency shift of 110Hz within 600s when it is exposed to 60ppm of NO. The frequency-changing rate is also found to increase with NO concentration. The chemical status of elements on the ITO surface before and after NO adsorption is investigated by X-ray photoelectron spectroscopy (XPS). Possible gas sensing mechanisms are discussed.",

keywords = "Gas sensing mechanisms, Indium tin oxide, Quartz crystal",

author = "Jianqiao Hu and Furong Zhu and Jian Zhang and Hao Gong",

year = "2003",

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note = "Proceedings of the Ninth International Meeting on Chemical Engineering ; Conference date: 07-07-2003 Through 10-07-2003",

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TY - JOUR

T1 - A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide

AU - Hu, Jianqiao

AU - Zhu, Furong

AU - Zhang, Jian

AU - Gong, Hao

PY - 2003/8/1

Y1 - 2003/8/1

N2 - Nitric oxide (NO) gas sensor using a combination of indium tin oxide (ITO) and quartz crystal microbalance is fabricated. The sensor is made from the polished AT-cut quartz crystal on which the ITO thin film is deposited using radio frequency magnetron sputtering. The sensor is sensitive to NO gas at room temperature and avoids the problems related to elevated-temperature sensors. It is shown that the sensor has a distinct negative frequency shift of 110Hz within 600s when it is exposed to 60ppm of NO. The frequency-changing rate is also found to increase with NO concentration. The chemical status of elements on the ITO surface before and after NO adsorption is investigated by X-ray photoelectron spectroscopy (XPS). Possible gas sensing mechanisms are discussed.

AB - Nitric oxide (NO) gas sensor using a combination of indium tin oxide (ITO) and quartz crystal microbalance is fabricated. The sensor is made from the polished AT-cut quartz crystal on which the ITO thin film is deposited using radio frequency magnetron sputtering. The sensor is sensitive to NO gas at room temperature and avoids the problems related to elevated-temperature sensors. It is shown that the sensor has a distinct negative frequency shift of 110Hz within 600s when it is exposed to 60ppm of NO. The frequency-changing rate is also found to increase with NO concentration. The chemical status of elements on the ITO surface before and after NO adsorption is investigated by X-ray photoelectron spectroscopy (XPS). Possible gas sensing mechanisms are discussed.

KW - Gas sensing mechanisms

KW - Indium tin oxide

KW - Quartz crystal

UR - https://www.scopus.com/pages/publications/0038110935

U2 - 10.1016/S0925-4005(03)00186-2

DO - 10.1016/S0925-4005(03)00186-2

M3 - 会议文章

AN - SCOPUS:0038110935

SN - 0925-4005

VL - 93

SP - 175

EP - 180

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 1-3

T2 - Proceedings of the Ninth International Meeting on Chemical Engineering

Y2 - 7 July 2003 through 10 July 2003

ER -

A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide

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