A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

Lingling Qiao; Fei He; Chen Wang; Ya Cheng; Koji Sugioka; Katsumi Midorikawa

doi:10.1007/s00339-010-6096-z

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

Lingling Qiao
, Fei He
, Chen Wang
, Ya Cheng^*
, Koji Sugioka
, Katsumi Midorikawa

^*此作品的通讯作者

CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
RIKEN

科研成果: 期刊稿件 › 文章 › 同行评审

36 引用（Scopus）

摘要

We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

源语言	英语
页（从-至）	179-183
页数	5
期刊	Applied Physics A: Materials Science and Processing
卷	102
期	1
DOI	https://doi.org/10.1007/s00339-010-6096-z
出版状态	已出版 - 1月 2011
已对外发布	是

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abstract = "We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.",

author = "Lingling Qiao and Fei He and Chen Wang and Ya Cheng and Koji Sugioka and Katsumi Midorikawa",

year = "2011",

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doi = "10.1007/s00339-010-6096-z",

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AU - Qiao, Lingling

AU - He, Fei

AU - Wang, Chen

AU - Cheng, Ya

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

PY - 2011/1

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N2 - We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

AB - We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

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JO - Applied Physics A: Materials Science and Processing

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IS - 1

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A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

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