A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

Jian Mao; Lufeng Che; Youling Lin; Yufang Li; Xiaofeng Zhou; Bin Xiong; Yuelin Wang

A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

Jian Mao
, Lufeng Che^*
, Youling Lin
, Yufang Li
, Xiaofeng Zhou
, Bin Xiong
, Yuelin Wang

^*此作品的通讯作者

CAS - Shanghai Institute of Microsystem and Information Technology
University of Chinese Academy of Sciences

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用（Scopus）

摘要

This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.

源语言	英语
页（从-至）	143-146
页数	4
期刊	Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics
卷	29
期	1
出版状态	已出版 - 3月 2009
已对外发布	是

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引用此

@article{e6d8795fbdf04ada84eb4d65d2370a61,

title = "A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap",

abstract = "This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.",

keywords = "Capacitive accelerometer, Capacitor gap control, Silicon-silicon bonding, Wafer-level vacuum package",

author = "Jian Mao and Lufeng Che and Youling Lin and Yufang Li and Xiaofeng Zhou and Bin Xiong and Yuelin Wang",

year = "2009",

month = mar,

language = "英语",

volume = "29",

pages = "143--146",

journal = "Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics",

issn = "1000-3819",

publisher = "Research Progress of Solid State Electronics",

number = "1",

}

TY - JOUR

T1 - A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

AU - Mao, Jian

AU - Che, Lufeng

AU - Lin, Youling

AU - Li, Yufang

AU - Zhou, Xiaofeng

AU - Xiong, Bin

AU - Wang, Yuelin

PY - 2009/3

Y1 - 2009/3

N2 - This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.

AB - This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.

KW - Capacitive accelerometer

KW - Capacitor gap control

KW - Silicon-silicon bonding

KW - Wafer-level vacuum package

UR - https://www.scopus.com/pages/publications/64049090950

M3 - 文章

AN - SCOPUS:64049090950

SN - 1000-3819

VL - 29

SP - 143

EP - 146

JO - Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

JF - Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

IS - 1

ER -

A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

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