基于喷墨打印的可实现敏感材料原位沉积和高温检测的柔性丙酮气体传感器

In combination of inkjet-printed carbon masking and surface modification of ion-exchange method(SMIE)techniques,silver interdigitated electrode for sensor and the resistors for heating were fabricated on different sides of the polyimide substrate subsequently. The controlled temperature,ranging from 25 ℃ to 280 ℃,can be realized by adjusting the DC bias voltage across the resistive heater. The integrated heater offered twofold functions:ZnO sensing film in situ deposition and elevated temperature detection. With the aid of heater,the ZnO sensing films composed of nanoparticles were first in situ deposited. The heater introduction can obviously improve the sensor performance. The results indicated that the sensitivity increased monotonically with temperature(<150 ℃). Since the acetone desorption on sensor surface had been facilitated,the sensor had the shortened response and recovery time,and the initial resistance drift is also tolerable. In addition,the heater can effectively reduce the interference from humidity during the acetone detection.