@inproceedings{ffffcb10896647bc83ec75c3d8571544,
title = "Wurtzite structure high Mg content ZnMgO thin films deposited by oxygen-plasma enhanced pulsed laser deposition",
abstract = "Wurtzite structure ZnMgO thin films with the energy gap (Eg) of 4.2 eV were deposited by oxygen-plasma enhanced pulsed laser deposition (PEPLD) on quartz glass. Oxygen-plasma increases the Zn content in ZnMgO thin film, which induced the evolution from cubic to hexagonal structure. The effects of target-substrate (T-S) distance on the band gap and crystal quality of ZnMgO thin film deposited by PEPLD were studied by transmittance spectra and Raman. The band gap of ZnMgO increased from 3.84 eV to 4.03 eV and the crystal quality decrease gradually when the T-S distance decreased from 9 cm to 5 cm.",
keywords = "Energy gap, Oxygen plasma, Pulsed laser deposition, ZnMgO thin film",
author = "Yanfei Gu and Xiaomin Li and Kong, \{J. F.\} and C. Yang and Shen, \{W. Z.\} and Zhang, \{Y. W.\} and Yu, \{W. D.\} and Gao, \{X. D.\}",
year = "2008",
doi = "10.1117/12.792272",
language = "英语",
isbn = "9780819471826",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Sixth International Conference on Thin Film Physics and Applications",
note = "6th International Conference on Thin Film Physics and Applications, TFPA 2007 ; Conference date: 25-09-2007 Through 28-09-2007",
}