Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses

Yuanxin Tan; Wei Chu; Peng Wang; Wenbo Li; Zhe Wang; Ya Cheng

doi:10.1364/OME.9.001971

Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses

Yuanxin Tan
, Wei Chu
, Peng Wang
, Wenbo Li
, Zhe Wang
, Ya Cheng

School of Physics and Electronic Science

CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
Tongji University
ShanghaiTech University
Shanxi University

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

We report fabrication of three-dimensional (3D) high aspect ratio microchannels from the rear-surface of thick silica glass with femtosecond laser pulses. To avoid nonlinear self-focusing in the conventional focusing scheme which leads to intensity clamping in the interaction of the ultrafast laser pulses with the silica glass, simultaneous spatiotemporal focusing is employed which gives rise to high aspect ratio (~30) straight and curved microchannels in 10mm thick silica glass substrates.

Original language	English
Article number	360898
Journal	Optical Materials Express
Volume	9
Issue number	4
DOIs	https://doi.org/10.1364/OME.9.001971
State	Published - 1 Apr 2019

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title = "Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses",

abstract = "We report fabrication of three-dimensional (3D) high aspect ratio microchannels from the rear-surface of thick silica glass with femtosecond laser pulses. To avoid nonlinear self-focusing in the conventional focusing scheme which leads to intensity clamping in the interaction of the ultrafast laser pulses with the silica glass, simultaneous spatiotemporal focusing is employed which gives rise to high aspect ratio (\textasciitilde{}30) straight and curved microchannels in 10mm thick silica glass substrates.",

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AU - Tan, Yuanxin

AU - Chu, Wei

AU - Wang, Peng

AU - Li, Wenbo

AU - Wang, Zhe

AU - Cheng, Ya

PY - 2019/4/1

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N2 - We report fabrication of three-dimensional (3D) high aspect ratio microchannels from the rear-surface of thick silica glass with femtosecond laser pulses. To avoid nonlinear self-focusing in the conventional focusing scheme which leads to intensity clamping in the interaction of the ultrafast laser pulses with the silica glass, simultaneous spatiotemporal focusing is employed which gives rise to high aspect ratio (~30) straight and curved microchannels in 10mm thick silica glass substrates.

AB - We report fabrication of three-dimensional (3D) high aspect ratio microchannels from the rear-surface of thick silica glass with femtosecond laser pulses. To avoid nonlinear self-focusing in the conventional focusing scheme which leads to intensity clamping in the interaction of the ultrafast laser pulses with the silica glass, simultaneous spatiotemporal focusing is employed which gives rise to high aspect ratio (~30) straight and curved microchannels in 10mm thick silica glass substrates.

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DO - 10.1364/OME.9.001971

M3 - 文章

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Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses

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