Abstract
W-Sb-Te phase-change material has been proposed to improve the performance of phase-change memory (PCM). Crystallization temperature, crystalline resistance, and 10-year data retention of Sb 2Te increase markedly by W doping. The W x(Sb 2Te) 1-x films crystallize quickly into a stable hexagonal phase with W uniformly distributing in the crystal lattice, which ensures faster SET speed and better operation stability for the application in practical device. PCM device based on W 0.07(Sb 2Te) 0.93 shows ultrafast SET operation (6 ns) and good endurance (1.8 × 10 5 cycles). W-Sb-Te material is a promising candidate for the trade-off between programming speed and data retention.
| Original language | English |
|---|---|
| Article number | 122108 |
| Journal | Applied Physics Letters |
| Volume | 101 |
| Issue number | 12 |
| DOIs | |
| State | Published - 17 Sep 2012 |