Variation of the microstructure and morphology with oxygen pressure in Ba0.51Sr0.48La0.01Nb2O6 thin films prepared by pulsed laser deposition

Zhitang Song; Chenglu Lin; Jipo Huang; Lianwei Wang; Jianming Zeng; Jianxia Gao; Huaping Xu; Masawori Okuyama

doi:10.1016/S0167-577X(99)00053-1

Variation of the microstructure and morphology with oxygen pressure in Ba_0.51Sr_0.48La_0.01Nb₂O₆ thin films prepared by pulsed laser deposition

Zhitang Song
, Chenglu Lin
, Jipo Huang
, Lianwei Wang
, Jianming Zeng
, Jianxia Gao
, Huaping Xu
, Masawori Okuyama

CAS - Shanghai Institute of Microsystem and Information Technology
The University of Osaka

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Pt-coated silicon substrates with strong (111) Pt texture were annealed in an oxidizing atmosphere at various temperatures. Dependence of the microstructure and morphology on oxygen partial pressure for SBLN films prepared by pulsed laser deposition were investigated by using X-ray diffraction and atomic force microscopy. The grain size and growth habits of SBLN films were influenced by oxygen partial pressure. As oxygen pressure increases at 10 Pa, nucleation and grains growth of the SBLN films were mainly influenced by the Pt grains of substrate. (100) and (310) texture growth of the SBLN film was revealed, and the film had good ε(f) properties.

Original language	English
Pages (from-to)	83-90
Number of pages	8
Journal	Materials Letters
Volume	40
Issue number	2
DOIs	https://doi.org/10.1016/S0167-577X(99)00053-1
State	Published - Jul 1999
Externally published	Yes

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title = "Variation of the microstructure and morphology with oxygen pressure in Ba0.51Sr0.48La0.01Nb2O6 thin films prepared by pulsed laser deposition",

abstract = "Pt-coated silicon substrates with strong (111) Pt texture were annealed in an oxidizing atmosphere at various temperatures. Dependence of the microstructure and morphology on oxygen partial pressure for SBLN films prepared by pulsed laser deposition were investigated by using X-ray diffraction and atomic force microscopy. The grain size and growth habits of SBLN films were influenced by oxygen partial pressure. As oxygen pressure increases at 10 Pa, nucleation and grains growth of the SBLN films were mainly influenced by the Pt grains of substrate. (100) and (310) texture growth of the SBLN film was revealed, and the film had good ε(f) properties.",

author = "Zhitang Song and Chenglu Lin and Jipo Huang and Lianwei Wang and Jianming Zeng and Jianxia Gao and Huaping Xu and Masawori Okuyama",

year = "1999",

month = jul,

doi = "10.1016/S0167-577X(99)00053-1",

language = "英语",

volume = "40",

pages = "83--90",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier B.V.",

number = "2",

}

TY - JOUR

T1 - Variation of the microstructure and morphology with oxygen pressure in Ba0.51Sr0.48La0.01Nb2O6 thin films prepared by pulsed laser deposition

AU - Song, Zhitang

AU - Lin, Chenglu

AU - Huang, Jipo

AU - Wang, Lianwei

AU - Zeng, Jianming

AU - Gao, Jianxia

AU - Xu, Huaping

AU - Okuyama, Masawori

PY - 1999/7

Y1 - 1999/7

N2 - Pt-coated silicon substrates with strong (111) Pt texture were annealed in an oxidizing atmosphere at various temperatures. Dependence of the microstructure and morphology on oxygen partial pressure for SBLN films prepared by pulsed laser deposition were investigated by using X-ray diffraction and atomic force microscopy. The grain size and growth habits of SBLN films were influenced by oxygen partial pressure. As oxygen pressure increases at 10 Pa, nucleation and grains growth of the SBLN films were mainly influenced by the Pt grains of substrate. (100) and (310) texture growth of the SBLN film was revealed, and the film had good ε(f) properties.

AB - Pt-coated silicon substrates with strong (111) Pt texture were annealed in an oxidizing atmosphere at various temperatures. Dependence of the microstructure and morphology on oxygen partial pressure for SBLN films prepared by pulsed laser deposition were investigated by using X-ray diffraction and atomic force microscopy. The grain size and growth habits of SBLN films were influenced by oxygen partial pressure. As oxygen pressure increases at 10 Pa, nucleation and grains growth of the SBLN films were mainly influenced by the Pt grains of substrate. (100) and (310) texture growth of the SBLN film was revealed, and the film had good ε(f) properties.

UR - https://www.scopus.com/pages/publications/0032656090

U2 - 10.1016/S0167-577X(99)00053-1

DO - 10.1016/S0167-577X(99)00053-1

M3 - 文章

AN - SCOPUS:0032656090

SN - 0167-577X

VL - 40

SP - 83

EP - 90

JO - Materials Letters

JF - Materials Letters

IS - 2

ER -

Variation of the microstructure and morphology with oxygen pressure in Ba_0.51Sr_0.48La_0.01Nb₂O₆ thin films prepared by pulsed laser deposition

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