Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

J. Lin, W. Fang, Y. Cheng, S. J. Yu, Y. G. Ma, F. He, L. Qiao, L. Tong, Z. Xu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on fabrication of ultra-high-Q (∼106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.

Original languageEnglish
Title of host publication2012 Conference on Lasers and Electro-Optics, CLEO 2012
StatePublished - 2012
Externally publishedYes
Event2012 Conference on Lasers and Electro-Optics, CLEO 2012 - San Jose, CA, United States
Duration: 6 May 201211 May 2012

Publication series

Name2012 Conference on Lasers and Electro-Optics, CLEO 2012

Conference

Conference2012 Conference on Lasers and Electro-Optics, CLEO 2012
Country/TerritoryUnited States
CitySan Jose, CA
Period6/05/1211/05/12

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