Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

J. Lin; W. Fang; Y. Cheng; S. J. Yu; Y. G. Ma; F. He; L. Qiao; L. Tong; Z. Xu

doi:10.1364/cleo_si.2012.cth5c.9

Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

J. Lin^*
, W. Fang
, Y. Cheng
, S. J. Yu
, Y. G. Ma
, F. He
, L. Qiao
, L. Tong
, Z. Xu

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on fabrication of ultra-high-Q (̃10⁶) whispering gallery microcavities on a used silica chip using a femtosecond laser, enabled by the high spatial resolution and threedimensional nature of femtosecond laser direct writing.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Applications and Technology, CLEO_AT 2012
Publisher	Optical Society of America (OSA)
Pages	CTh5C.9
ISBN (Print)	9781557529435
DOIs	https://doi.org/10.1364/cleo_si.2012.cth5c.9
State	Published - 2012
Externally published	Yes
Event	CLEO: Applications and Technology, CLEO_AT 2012 - San Jose, CA, United States Duration: 6 May 2012 → 11 May 2012

Publication series

Name	CLEO: Applications and Technology, CLEO_AT 2012

Conference

Conference	CLEO: Applications and Technology, CLEO_AT 2012
Country/Territory	United States
City	San Jose, CA
Period	6/05/12 → 11/05/12

Access to Document

10.1364/cleo_si.2012.cth5c.9

Cite this

Lin, J., Fang, W., Cheng, Y., Yu, S. J., Ma, Y. G., He, F., Qiao, L., Tong, L., & Xu, Z. (2012). Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication. In CLEO: Applications and Technology, CLEO_AT 2012 (pp. CTh5C.9). (CLEO: Applications and Technology, CLEO_AT 2012). Optical Society of America (OSA). https://doi.org/10.1364/cleo_si.2012.cth5c.9

@inproceedings{a2ec1d5ef4f4488babfde94d93697536,

title = "Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication",

abstract = "We report on fabrication of ultra-high-Q {\~(}106) whispering gallery microcavities on a used silica chip using a femtosecond laser, enabled by the high spatial resolution and threedimensional nature of femtosecond laser direct writing.",

author = "J. Lin and W. Fang and Y. Cheng and Yu, \{S. J.\} and Ma, \{Y. G.\} and F. He and L. Qiao and L. Tong and Z. Xu",

year = "2012",

doi = "10.1364/cleo\_si.2012.cth5c.9",

language = "英语",

isbn = "9781557529435",

series = "CLEO: Applications and Technology, CLEO\_AT 2012",

publisher = "Optical Society of America (OSA)",

pages = "CTh5C.9",

booktitle = "CLEO",

note = "CLEO: Applications and Technology, CLEO\_AT 2012 ; Conference date: 06-05-2012 Through 11-05-2012",

}

Lin, J, Fang, W, Cheng, Y, Yu, SJ, Ma, YG, He, F, Qiao, L, Tong, L & Xu, Z 2012, Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication. in CLEO: Applications and Technology, CLEO_AT 2012. CLEO: Applications and Technology, CLEO_AT 2012, Optical Society of America (OSA), pp. CTh5C.9, CLEO: Applications and Technology, CLEO_AT 2012, San Jose, CA, United States, 6/05/12. https://doi.org/10.1364/cleo_si.2012.cth5c.9

Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication. / Lin, J.; Fang, W.; Cheng, Y. et al.
CLEO: Applications and Technology, CLEO_AT 2012. Optical Society of America (OSA), 2012. p. CTh5C.9 (CLEO: Applications and Technology, CLEO_AT 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

AU - Lin, J.

AU - Fang, W.

AU - Cheng, Y.

AU - Yu, S. J.

AU - Ma, Y. G.

AU - He, F.

AU - Qiao, L.

AU - Tong, L.

AU - Xu, Z.

PY - 2012

Y1 - 2012

N2 - We report on fabrication of ultra-high-Q (̃106) whispering gallery microcavities on a used silica chip using a femtosecond laser, enabled by the high spatial resolution and threedimensional nature of femtosecond laser direct writing.

AB - We report on fabrication of ultra-high-Q (̃106) whispering gallery microcavities on a used silica chip using a femtosecond laser, enabled by the high spatial resolution and threedimensional nature of femtosecond laser direct writing.

UR - https://www.scopus.com/pages/publications/84890748082

U2 - 10.1364/cleo_si.2012.cth5c.9

DO - 10.1364/cleo_si.2012.cth5c.9

M3 - 会议稿件

AN - SCOPUS:84890748082

SN - 9781557529435

T3 - CLEO: Applications and Technology, CLEO_AT 2012

SP - CTh5C.9

BT - CLEO

PB - Optical Society of America (OSA)

T2 - CLEO: Applications and Technology, CLEO_AT 2012

Y2 - 6 May 2012 through 11 May 2012

ER -

Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

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