Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

K. Sugioka; M. Masuda; T. Hongo; Y. Cheng; K. Shihoyama; K. Midorikawa

doi:10.1007/s00339-004-2569-2

Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

K. Sugioka^*
, M. Masuda
, T. Hongo
, Y. Cheng
, K. Shihoyama
, K. Midorikawa

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

90 Scopus citations

Abstract

A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40-50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique.

Original language	English
Pages (from-to)	815-817
Number of pages	3
Journal	Applied Physics A: Materials Science and Processing
Volume	79
Issue number	4-6
DOIs	https://doi.org/10.1007/s00339-004-2569-2
State	Published - 2004
Externally published	Yes

Access to Document

10.1007/s00339-004-2569-2

Cite this

@article{3b32e047937d4dfb8a0cbd093c8286e5,

title = "Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications",

abstract = "A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40-50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique.",

author = "K. Sugioka and M. Masuda and T. Hongo and Y. Cheng and K. Shihoyama and K. Midorikawa",

year = "2004",

doi = "10.1007/s00339-004-2569-2",

language = "英语",

volume = "79",

pages = "815--817",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "4-6",

}

TY - JOUR

T1 - Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

AU - Sugioka, K.

AU - Masuda, M.

AU - Hongo, T.

AU - Cheng, Y.

AU - Shihoyama, K.

AU - Midorikawa, K.

PY - 2004

Y1 - 2004

N2 - A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40-50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique.

AB - A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40-50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique.

UR - https://www.scopus.com/pages/publications/4344560198

U2 - 10.1007/s00339-004-2569-2

DO - 10.1007/s00339-004-2569-2

M3 - 文章

AN - SCOPUS:4344560198

SN - 0947-8396

VL - 79

SP - 815

EP - 817

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 4-6

ER -

Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

Abstract

Access to Document

Other files and links

Fingerprint

Cite this