Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Aodong Zhang; Jian Xu; Yucen Li; Ming Hu; Zijie Lin; Yunpeng Song; Jia Qi; Wei Chen; Zhaoxiang Liu; Ya Cheng

doi:10.3390/mi13040543

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Aodong Zhang
, Jian Xu^*
, Yucen Li
, Ming Hu
, Zijie Lin
, Yunpeng Song
, Jia Qi
, Wei Chen
, Zhaoxiang Liu
, Ya Cheng^*

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

Original language	English
Article number	543
Journal	Micromachines
Volume	13
Issue number	4
DOIs	https://doi.org/10.3390/mi13040543
State	Published - Apr 2022

Keywords

3D glass microfluidics
carbon dioxide laser processing
chemical etching
continuous-flow photochemical synthesis
fused silica
ultrafast laser direct writing

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10.3390/mi13040543

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@article{ee8a3e50105643098a18639ede1f1988,

title = "Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis",

abstract = "We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at \textasciitilde{}280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.",

keywords = "3D glass microfluidics, carbon dioxide laser processing, chemical etching, continuous-flow photochemical synthesis, fused silica, ultrafast laser direct writing",

author = "Aodong Zhang and Jian Xu and Yucen Li and Ming Hu and Zijie Lin and Yunpeng Song and Jia Qi and Wei Chen and Zhaoxiang Liu and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2022",

month = apr,

doi = "10.3390/mi13040543",

language = "英语",

volume = "13",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "4",

}

TY - JOUR

T1 - Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

AU - Zhang, Aodong

AU - Xu, Jian

AU - Li, Yucen

AU - Hu, Ming

AU - Lin, Zijie

AU - Song, Yunpeng

AU - Qi, Jia

AU - Chen, Wei

AU - Liu, Zhaoxiang

AU - Cheng, Ya

PY - 2022/4

Y1 - 2022/4

N2 - We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

AB - We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

KW - 3D glass microfluidics

KW - carbon dioxide laser processing

KW - chemical etching

KW - continuous-flow photochemical synthesis

KW - fused silica

KW - ultrafast laser direct writing

UR - https://www.scopus.com/pages/publications/85128259433

U2 - 10.3390/mi13040543

DO - 10.3390/mi13040543

M3 - 文章

AN - SCOPUS:85128259433

SN - 2072-666X

VL - 13

JO - Micromachines

JF - Micromachines

IS - 4

M1 - 543

ER -

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Abstract

Keywords

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