Three dimensional functional microfluidic chips fabricated by hybrid femtosecond laser microfabrication

  • Dong Wu
  • , Si Zhu
  • , Jian Xu
  • , Koji Sugioka
  • , Katsumi Midorikawa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We propose a novel strategy which fuses femtosecond laser TPP and FLAE to integrate 3D complex polymer microdevices into glass-based microfluidic devices for highly functional applications. 3D microfilters were fabricated, showing excellent filtering functions.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs
StatePublished - 2013
Externally publishedYes
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: 30 Jun 20134 Jul 2013

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Conference

Conference10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Country/TerritoryJapan
CityKyoto
Period30/06/134/07/13

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