Thermal stability of VSe2 investigated by in situ transmission electron microscope

  • Changqing Ye
  • , Dongming Liu
  • , Junhao Shen
  • , Hengchang Bi
  • , Xing Wu
  • , Chaolun Wang*
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Two-dimensional (2D) materials with the ultrathin morphology and versatile electronic properties are promising candidates for the advanced electronics. The metallic 2D vanadium diselenide (VSe2) with high conductivity could be applied as the electrode material for 2D-material-based sensors and transistors. Due to the atomically thin structure, the thermal stability of the 2D material is critical for both device fabrication and reliable application. However, the understanding of the failure mechanism is deficient. This work presents a mechanism of thermal induced defect that is not reported by in situ thermal transmission electron microscope. Different from 2H-MoS2 that generates vacancies, the 1T-VSe2 presents phase transition from VSe2 to V2Se9 at 300 °C, and the phase transition is irreversible. This work offers the experimental support for the new understanding of thermal stability of 2D materials.

Original languageEnglish
Title of host publication2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350301649
DOIs
StatePublished - 2023
Event2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2023 - Pulau Pinang, Malaysia
Duration: 24 Jul 202327 Jul 2023

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
Volume2023-July

Conference

Conference2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2023
Country/TerritoryMalaysia
CityPulau Pinang
Period24/07/2327/07/23

Keywords

  • Thermal stability
  • in situ transmission electron microscope
  • phase transition
  • two-dimensional material
  • vanadium diselenide

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