Abstract
We have been developing a monolithic microbolometer technology for uncooled infrared focal plane arrays (Uncooled IRFPAs) along the route from fabricating pixels of thin-film dielectric bolometers on micromachined silicon substrates. In the paper, the thermal-sensitive barium strontium titanate (BST) thin film capacitors for that objective prepared by Radio-Frequency Magnetron sputtering have been investigated focusing on the condition of fabrication of BST thin films. Capacitor-Temperature properties of the thermal-sensitive BST thin film capacitors have been measured with impedance analyzer. According to the Capacitor-temperature curves, these indicated that the temperature coefficient of dielectric constant (TCD) within the ambient temperature region highly depended on the Radio-Frequency Magnetron sputtering condition of fabrication of BST thin films. BST thin film capacitors with TCD-value more than 21%/K have been prepared on the optimized condition. That is a good base for preparation of dielectric bolometer mode of uncooled IRFPAs.
| Original language | English |
|---|---|
| Pages (from-to) | 601-603 |
| Number of pages | 3 |
| Journal | Microelectronics Journal |
| Volume | 35 |
| Issue number | 7 |
| DOIs | |
| State | Published - Jul 2004 |
| Externally published | Yes |
Keywords
- BST thin film capacitors
- Dielectric bolometer mode
- Temperature coefficient of dielectric constant
- Thermal-sensitive