Theoretical study of monolithic pyroelectric sensor arrays by thermal diffusion equation

  • Jian Yu*
  • , Yunong Ling
  • , Jinglan Sun
  • , Xiangjian Meng
  • , Junhao Chu
  • , Dingyuan Tang
  • *Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

Distributed parameter model is used for computation of the performances of single pixel of PZT ferroelectric thin film infrared uncooled focal plane array (IR-UFPA) with two kinds of thermal isolation structures. The detector performances are found to be related closely to the thermal isolation structure. The preferred thickness of pyroelectric thin film is in the region of 0.3-2 micrometers for pixel dimensions 50 X 50 and 100 X 100 micrometers 2. And the preamplifier current noise is the dominant noise when it more than 10-16 A(DOT)Hz-1/2 in PZT-UFPA device.

Original languageEnglish
Pages (from-to)696-699
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4086
DOIs
StatePublished - 2000
Externally publishedYes
Event4th International Conference on Thin Film Physics and Applications - Shanghai, China
Duration: 8 May 200011 May 2000

Keywords

  • Distributed parameter model
  • PZT
  • UFPA performance

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