@inproceedings{4e0d7d0494614e64b0a29dac623663cd,
title = "The optical spectra of carbon-based thin films measured by the photothermal deflection spectroscopy (PDS)",
abstract = "Our photothermal deflection spectroscopy (PDS) setup allows to measure simultaneously the absolute values of the optical transmittance T, reflectance R and absorptance A spectra of thin layers on glass substrates in the spectral range from ultraviolet to near infrared light with the typical spectral resolution 5 nm in the ultraviolet, 10 nm in visible and 20 nm in the near infrared region. The PDS setup provides the dynamic detection range in the optical absorptance up to 4 orders of magnitude. Here we demonstrate the usability of this setup by comparing the optical absorbance on a series of the carbon layer and nanocrystalline diamond (NCD) thin layers deposited on glass substrates by using the magnetron sputtering and the microwave based surface wave-discharge in linear antenna chemical vapor deposition (CVD) processes, respectively. The defect-induced localized states in the energy gap are observed in all carbon layers as well as in NCD.",
keywords = "Amorphous carbon, CVD, Magnetron sputtering, Nanocrystalline diamond, Optical spectroscopy",
author = "Z. Remes and Pham, \{Tuan T.\} and M. Varga and A. Kromka and J. Stuchlik and Mao, \{H. B.\}",
year = "2013",
language = "英语",
series = "NANOCON 2013 - Conference Proceedings, 5th International Conference",
publisher = "TANGER Ltd.",
pages = "405--409",
booktitle = "NANOCON 2013 - Conference Proceedings, 5th International Conference",
address = "捷克共和国",
note = "5th International Conference NANOCON 2013 ; Conference date: 16-10-2013 Through 18-10-2013",
}