The grain size effect of the Pb(Zr0.45Ti0.55)O 3 thin films deposited on LaNiO3-coated silicon by modified sol-gel process

S. H. Hu*, G. J. Hu, X. J. Meng, G. S. Wang, J. L. Sun, S. L. Guo, J. H. Chu, N. Dai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

51 Scopus citations

Abstract

Highly (1 0 0) oriented PZT thin films with different grain sizes have been deposited on an LaNiO3-coated silicon substrate by a modified sol-gel process. The growth mechanism of films with high (1 0 0) orientation and the effects of grain size on the dielectric and ferroelectric properties of the films are qualitatively discussed. Measurements of dielectric and ferroelectric properties reveal that films of large grain sizes present large relative dielectric permittivity and large remnant polarization.

Original languageEnglish
Pages (from-to)109-114
Number of pages6
JournalJournal of Crystal Growth
Volume260
Issue number1-2
DOIs
StatePublished - 2 Jan 2004
Externally publishedYes

Keywords

  • A1. X-ray diffraction
  • B1. Perovskites
  • B2. Ferroelectric materials

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