The effect of Cu/Mo bi-layer film on the structural, morphological and electro-optical characteristics of AZO/metal/AZO transparent conductive film

Yixin Guo; Wenjuan Cheng; Jinchun Jiang; Shaohua Zuo; Fuwen Shi; Junhao Chu

doi:10.1016/j.vacuum.2016.06.014

The effect of Cu/Mo bi-layer film on the structural, morphological and electro-optical characteristics of AZO/metal/AZO transparent conductive film

Yixin Guo, Wenjuan Cheng, Jinchun Jiang, Shaohua Zuo, Fuwen Shi, Junhao Chu

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

In this paper, AZO/Mo, AZO/Mo/AZO and AZO/Cu/Mo/AZO multi-layer films were prepared on soda-lime glass and Si(100) substrate by magnetron sputtering at room temperature. The effect of Mo and Cu layer thickness on the structural, morphological and electro-optical properties of the multilayer films was discussed. The film with inserted 6 nm and 9 nm Mo layer achieved the best factor of merit for AZO/Mo and AZO/Mo/AZO structure respectively. The optoelectronic properties of multi-layer films were significantly improved by introducing a thin Cu layer at the interface between Mo and AZO films. The low sheet resistance of 45 Ω/sq and a transmittance of 78% were obtained by AZO (50 nm)/Cu(3 nm)/Mo (6 nm)/AZO (50 nm) structure. The result shows thin Cu layer may improve the optoelectronic properties of AZO/Mo/AZO film, which making it more suitable for application in optoelectronic device.

Original language	English
Pages (from-to)	164-169
Number of pages	6
Journal	Vacuum
Volume	131
DOIs	https://doi.org/10.1016/j.vacuum.2016.06.014
State	Published - 1 Sep 2016

Keywords

Cu/Mo
Magnetron sputtering
Multi-layer film
Transparent conducting oxide

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title = "The effect of Cu/Mo bi-layer film on the structural, morphological and electro-optical characteristics of AZO/metal/AZO transparent conductive film",

abstract = "In this paper, AZO/Mo, AZO/Mo/AZO and AZO/Cu/Mo/AZO multi-layer films were prepared on soda-lime glass and Si(100) substrate by magnetron sputtering at room temperature. The effect of Mo and Cu layer thickness on the structural, morphological and electro-optical properties of the multilayer films was discussed. The film with inserted 6 nm and 9 nm Mo layer achieved the best factor of merit for AZO/Mo and AZO/Mo/AZO structure respectively. The optoelectronic properties of multi-layer films were significantly improved by introducing a thin Cu layer at the interface between Mo and AZO films. The low sheet resistance of 45 Ω/sq and a transmittance of 78\% were obtained by AZO (50 nm)/Cu(3 nm)/Mo (6 nm)/AZO (50 nm) structure. The result shows thin Cu layer may improve the optoelectronic properties of AZO/Mo/AZO film, which making it more suitable for application in optoelectronic device.",

keywords = "Cu/Mo, Magnetron sputtering, Multi-layer film, Transparent conducting oxide",

author = "Yixin Guo and Wenjuan Cheng and Jinchun Jiang and Shaohua Zuo and Fuwen Shi and Junhao Chu",

note = "Publisher Copyright: {\textcopyright} 2016 Elsevier Ltd",

year = "2016",

month = sep,

day = "1",

doi = "10.1016/j.vacuum.2016.06.014",

language = "英语",

volume = "131",

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TY - JOUR

T1 - The effect of Cu/Mo bi-layer film on the structural, morphological and electro-optical characteristics of AZO/metal/AZO transparent conductive film

AU - Guo, Yixin

AU - Cheng, Wenjuan

AU - Jiang, Jinchun

AU - Zuo, Shaohua

AU - Shi, Fuwen

AU - Chu, Junhao

PY - 2016/9/1

Y1 - 2016/9/1

N2 - In this paper, AZO/Mo, AZO/Mo/AZO and AZO/Cu/Mo/AZO multi-layer films were prepared on soda-lime glass and Si(100) substrate by magnetron sputtering at room temperature. The effect of Mo and Cu layer thickness on the structural, morphological and electro-optical properties of the multilayer films was discussed. The film with inserted 6 nm and 9 nm Mo layer achieved the best factor of merit for AZO/Mo and AZO/Mo/AZO structure respectively. The optoelectronic properties of multi-layer films were significantly improved by introducing a thin Cu layer at the interface between Mo and AZO films. The low sheet resistance of 45 Ω/sq and a transmittance of 78% were obtained by AZO (50 nm)/Cu(3 nm)/Mo (6 nm)/AZO (50 nm) structure. The result shows thin Cu layer may improve the optoelectronic properties of AZO/Mo/AZO film, which making it more suitable for application in optoelectronic device.

AB - In this paper, AZO/Mo, AZO/Mo/AZO and AZO/Cu/Mo/AZO multi-layer films were prepared on soda-lime glass and Si(100) substrate by magnetron sputtering at room temperature. The effect of Mo and Cu layer thickness on the structural, morphological and electro-optical properties of the multilayer films was discussed. The film with inserted 6 nm and 9 nm Mo layer achieved the best factor of merit for AZO/Mo and AZO/Mo/AZO structure respectively. The optoelectronic properties of multi-layer films were significantly improved by introducing a thin Cu layer at the interface between Mo and AZO films. The low sheet resistance of 45 Ω/sq and a transmittance of 78% were obtained by AZO (50 nm)/Cu(3 nm)/Mo (6 nm)/AZO (50 nm) structure. The result shows thin Cu layer may improve the optoelectronic properties of AZO/Mo/AZO film, which making it more suitable for application in optoelectronic device.

KW - Cu/Mo

KW - Magnetron sputtering

KW - Multi-layer film

KW - Transparent conducting oxide

UR - https://www.scopus.com/pages/publications/84975804388

U2 - 10.1016/j.vacuum.2016.06.014

DO - 10.1016/j.vacuum.2016.06.014

M3 - 文章

AN - SCOPUS:84975804388

SN - 0042-207X

VL - 131

SP - 164

EP - 169

JO - Vacuum

JF - Vacuum

ER -

The effect of Cu/Mo bi-layer film on the structural, morphological and electro-optical characteristics of AZO/metal/AZO transparent conductive film

Abstract

Keywords

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