The Application of ZnO Thin Film Humidity Sensor Fabricated by Atmospheric Pressure Plasma Jet

Qi Han; Chun Huang; Jian Zhang

doi:10.3969/j.issn.1004-1699.2017.03.006

The Application of ZnO Thin Film Humidity Sensor Fabricated by Atmospheric Pressure Plasma Jet

Qi Han, Chun Huang, Jian Zhang

School of Communication and Electronic Engineering

East China Normal University

Research output: Contribution to journal › Article › peer-review

Abstract

The deposition of ZnO thin films by an atmospheric pressure plasma jet (APPJ) is presented. The APPJ is generated by an AC power source with a repetitive frequency up to 20 kHz using N₂ as the plasma gas. And Zn(NO₃)₂ precursor solution for ZnO was sprayed into the downstream of the APPJ. With the optimized retention time and jet temperature, a nearly full conversion of the precursor solution to ZnO thin films had been conducted. The ZnO thin films were first characterized by XRD, SEM, UV-Vis and etc. Then, the humidity sensing characteristics such as sensitivity and hysteresis of resulted film was studied. The results indicated that the ZnO films with deposition time of 5 min has the sensitivity of 0.435 pF/% RH and 19.634 pF/% RH under the low and high humidity level. The lower hysteresis and the shorter response time was also obtained.

Original language	English
Pages (from-to)	368-372
Number of pages	5
Journal	Chinese Journal of Sensors and Actuators
Volume	30
Issue number	3
DOIs	https://doi.org/10.3969/j.issn.1004-1699.2017.03.006
State	Published - 1 Mar 2017

Keywords

Aerosol
Atmospheric pressure plasma
Capacitive
Humidity sensor
ZnO

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10.3969/j.issn.1004-1699.2017.03.006

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title = "The Application of ZnO Thin Film Humidity Sensor Fabricated by Atmospheric Pressure Plasma Jet",

abstract = "The deposition of ZnO thin films by an atmospheric pressure plasma jet (APPJ) is presented. The APPJ is generated by an AC power source with a repetitive frequency up to 20 kHz using N2 as the plasma gas. And Zn(NO3)2 precursor solution for ZnO was sprayed into the downstream of the APPJ. With the optimized retention time and jet temperature, a nearly full conversion of the precursor solution to ZnO thin films had been conducted. The ZnO thin films were first characterized by XRD, SEM, UV-Vis and etc. Then, the humidity sensing characteristics such as sensitivity and hysteresis of resulted film was studied. The results indicated that the ZnO films with deposition time of 5 min has the sensitivity of 0.435 pF/\% RH and 19.634 pF/\% RH under the low and high humidity level. The lower hysteresis and the shorter response time was also obtained.",

keywords = "Aerosol, Atmospheric pressure plasma, Capacitive, Humidity sensor, ZnO",

author = "Qi Han and Chun Huang and Jian Zhang",

year = "2017",

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doi = "10.3969/j.issn.1004-1699.2017.03.006",

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TY - JOUR

T1 - The Application of ZnO Thin Film Humidity Sensor Fabricated by Atmospheric Pressure Plasma Jet

AU - Han, Qi

AU - Huang, Chun

AU - Zhang, Jian

PY - 2017/3/1

Y1 - 2017/3/1

N2 - The deposition of ZnO thin films by an atmospheric pressure plasma jet (APPJ) is presented. The APPJ is generated by an AC power source with a repetitive frequency up to 20 kHz using N2 as the plasma gas. And Zn(NO3)2 precursor solution for ZnO was sprayed into the downstream of the APPJ. With the optimized retention time and jet temperature, a nearly full conversion of the precursor solution to ZnO thin films had been conducted. The ZnO thin films were first characterized by XRD, SEM, UV-Vis and etc. Then, the humidity sensing characteristics such as sensitivity and hysteresis of resulted film was studied. The results indicated that the ZnO films with deposition time of 5 min has the sensitivity of 0.435 pF/% RH and 19.634 pF/% RH under the low and high humidity level. The lower hysteresis and the shorter response time was also obtained.

AB - The deposition of ZnO thin films by an atmospheric pressure plasma jet (APPJ) is presented. The APPJ is generated by an AC power source with a repetitive frequency up to 20 kHz using N2 as the plasma gas. And Zn(NO3)2 precursor solution for ZnO was sprayed into the downstream of the APPJ. With the optimized retention time and jet temperature, a nearly full conversion of the precursor solution to ZnO thin films had been conducted. The ZnO thin films were first characterized by XRD, SEM, UV-Vis and etc. Then, the humidity sensing characteristics such as sensitivity and hysteresis of resulted film was studied. The results indicated that the ZnO films with deposition time of 5 min has the sensitivity of 0.435 pF/% RH and 19.634 pF/% RH under the low and high humidity level. The lower hysteresis and the shorter response time was also obtained.

KW - Aerosol

KW - Atmospheric pressure plasma

KW - Capacitive

KW - Humidity sensor

KW - ZnO

UR - https://www.scopus.com/pages/publications/85020790632

U2 - 10.3969/j.issn.1004-1699.2017.03.006

DO - 10.3969/j.issn.1004-1699.2017.03.006

M3 - 文章

AN - SCOPUS:85020790632

SN - 1004-1699

VL - 30

SP - 368

EP - 372

JO - Chinese Journal of Sensors and Actuators

JF - Chinese Journal of Sensors and Actuators

IS - 3

ER -

The Application of ZnO Thin Film Humidity Sensor Fabricated by Atmospheric Pressure Plasma Jet

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Keywords

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