Abstract
In this paper, the on wafer measurement methods based on the micro strip line structure and coplanar waveguide structure have been developed for terahertz High Electron Mobility Transistor (HEMT). The measurement layout structures have been designed, and the corresponding small signal equivalent circuit models and parameter extraction procedures are given. The experimental results show that the S-parameters agree well between modeled and measured data in the frequency range of 1–110 GHz.
| Original language | English |
|---|---|
| Article number | 106846 |
| Journal | Microelectronics Journal |
| Volume | 165 |
| DOIs | |
| State | Published - Nov 2025 |
Keywords
- HEMT
- Measurement
- Parameter extraction
- Small signal model