Terahertz high electron mobility transistor characterization and on-wafer measurement

Dong Xiong, Jing Bai, Yuan Ting Lyu, Ao Zhang, Jian Jun Gao

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, the on wafer measurement methods based on the micro strip line structure and coplanar waveguide structure have been developed for terahertz High Electron Mobility Transistor (HEMT). The measurement layout structures have been designed, and the corresponding small signal equivalent circuit models and parameter extraction procedures are given. The experimental results show that the S-parameters agree well between modeled and measured data in the frequency range of 1–110 GHz.

Original languageEnglish
Article number106846
JournalMicroelectronics Journal
Volume165
DOIs
StatePublished - Nov 2025

Keywords

  • HEMT
  • Measurement
  • Parameter extraction
  • Small signal model

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