Tailored femtosecond bessel beam processing- application to through Si vias for 3d Si ICs -

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	JSAP-OSA Joint Symposia, JSAP 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9784863486416
ISBN (Print)	9784863486416
State	Published - 2017
Externally published	Yes
Event	JSAP-OSA Joint Symposia, JSAP 2017 - Fukuoka, Japan Duration: 18 Sep 2017 → 21 Sep 2017

Name	Optics InfoBase Conference Papers
Volume	Part F78-JSAP 2017
ISSN (Electronic)	2162-2701

Cite this

@inproceedings{08a806f37863499a8e928986d21c1a7d,

title = "Tailored femtosecond bessel beam processing- application to through Si vias for 3d Si ICs -",

author = "Koji Sugioka and Fei He and Ya Cheng",

year = "2017",

language = "英语",

isbn = "9784863486416",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "JSAP-OSA Joint Symposia, JSAP 2017",

address = "美国",

note = "JSAP-OSA Joint Symposia, JSAP 2017 ; Conference date: 18-09-2017 Through 21-09-2017",

}

Tailored femtosecond bessel beam processing- application to through Si vias for 3d Si ICs -. / Sugioka, Koji; He, Fei; Cheng, Ya.
JSAP-OSA Joint Symposia, JSAP 2017. Optica Publishing Group (formerly OSA), 2017. (Optics InfoBase Conference Papers; Vol. Part F78-JSAP 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Tailored femtosecond bessel beam processing- application to through Si vias for 3d Si ICs -

AU - Sugioka, Koji

AU - He, Fei

AU - Cheng, Ya

PY - 2017

Y1 - 2017

UR - https://www.scopus.com/pages/publications/85039554428

M3 - 会议稿件

AN - SCOPUS:85039554428

SN - 9784863486416

T3 - Optics InfoBase Conference Papers

BT - JSAP-OSA Joint Symposia, JSAP 2017

PB - Optica Publishing Group (formerly OSA)

T2 - JSAP-OSA Joint Symposia, JSAP 2017

Y2 - 18 September 2017 through 21 September 2017

ER -