Systematic direct solid modeling approach for surface micromachined MEMS

Jianhua Li; Yusheng Liu; Hao Ling; Weibin Guo; Gaoqi He

doi:10.4028/www.scientific.net/AMR.433-440.3130

Systematic direct solid modeling approach for surface micromachined MEMS

Jianhua Li^*
, Yusheng Liu
, Hao Ling
, Weibin Guo
, Gaoqi He

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode.

Original language	English
Title of host publication	Materials Science and Information Technology, MSIT2011
Pages	3130-3137
Number of pages	8
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.433-440.3130
State	Published - 2012
Externally published	Yes
Event	2011 International Conference on Material Science and Information Technology, MSIT2011 - Singapore, Singapore Duration: 16 Sep 2011 → 18 Sep 2011

Publication series

Name	Advanced Materials Research
Volume	433-440
ISSN (Print)	1022-6680

Conference

Conference	2011 International Conference on Material Science and Information Technology, MSIT2011
Country/Territory	Singapore
City	Singapore
Period	16/09/11 → 18/09/11

Keywords

CAD
Direct solid modeling
MEMS
Surface micromachining

Access to Document

10.4028/www.scientific.net/AMR.433-440.3130

Cite this

@inproceedings{cef42da90c36438b8de7d549d0aa6808,

title = "Systematic direct solid modeling approach for surface micromachined MEMS",

abstract = "Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode.",

keywords = "CAD, Direct solid modeling, MEMS, Surface micromachining",

author = "Jianhua Li and Yusheng Liu and Hao Ling and Weibin Guo and Gaoqi He",

year = "2012",

doi = "10.4028/www.scientific.net/AMR.433-440.3130",

language = "英语",

isbn = "9783037853191",

series = "Advanced Materials Research",

pages = "3130--3137",

booktitle = "Materials Science and Information Technology, MSIT2011",

note = "2011 International Conference on Material Science and Information Technology, MSIT2011 ; Conference date: 16-09-2011 Through 18-09-2011",

}

Li, J, Liu, Y, Ling, H, Guo, W & He, G 2012, Systematic direct solid modeling approach for surface micromachined MEMS. in Materials Science and Information Technology, MSIT2011. Advanced Materials Research, vol. 433-440, pp. 3130-3137, 2011 International Conference on Material Science and Information Technology, MSIT2011, Singapore, Singapore, 16/09/11. https://doi.org/10.4028/www.scientific.net/AMR.433-440.3130

TY - GEN

T1 - Systematic direct solid modeling approach for surface micromachined MEMS

AU - Li, Jianhua

AU - Liu, Yusheng

AU - Ling, Hao

AU - Guo, Weibin

AU - He, Gaoqi

PY - 2012

Y1 - 2012

N2 - Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode.

AB - Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode.

KW - CAD

KW - Direct solid modeling

KW - MEMS

KW - Surface micromachining

UR - https://www.scopus.com/pages/publications/84862911512

U2 - 10.4028/www.scientific.net/AMR.433-440.3130

DO - 10.4028/www.scientific.net/AMR.433-440.3130

M3 - 会议稿件

AN - SCOPUS:84862911512

SN - 9783037853191

T3 - Advanced Materials Research

SP - 3130

EP - 3137

BT - Materials Science and Information Technology, MSIT2011

T2 - 2011 International Conference on Material Science and Information Technology, MSIT2011

Y2 - 16 September 2011 through 18 September 2011

ER -

Systematic direct solid modeling approach for surface micromachined MEMS

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Keywords

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