Synthesis, characterization and application of nano-structured Mo 2C thin films

H. Y. Chen; L. Chen; Y. Lu; Q. Hong; H. C. Chua; S. B. Tang; J. Lin

doi:10.1016/j.cattod.2004.06.116

Synthesis, characterization and application of nano-structured Mo ₂C thin films

H. Y. Chen
, L. Chen
, Y. Lu
, Q. Hong
, H. C. Chua
, S. B. Tang
, J. Lin^*

^*Corresponding author for this work

National University of Singapore

Research output: Contribution to journal › Conference article › peer-review

24 Scopus citations

Abstract

Nano-structured Mo₂C thin films were grown on Si(1 0 0) by metal-organic chemical vapor deposition using Mo(CO)₆ as precursor. Well crystalline thin films could be synthesized only in the case where the precursor vapor was present before deposition temperature was rapidly reached. A reaction scheme is postulated. The formation of benzene from methane over the nano-structured Mo films has been observed in micro-reactor studies and confirms that Mo₂C + MoO₃ are an active catalyst for methane conversion.

Original language	English
Pages (from-to)	161-164
Number of pages	4
Journal	Catalysis Today
Volume	96
Issue number	3
DOIs	https://doi.org/10.1016/j.cattod.2004.06.116
State	Published - 2004
Externally published	Yes

Keywords

MOCVD
Mo(CO)
MoC
Nano-structure
Thin films

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10.1016/j.cattod.2004.06.116

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@article{28c599809e3048289958b0e532114f0f,

title = "Synthesis, characterization and application of nano-structured Mo 2C thin films",

abstract = "Nano-structured Mo2C thin films were grown on Si(1 0 0) by metal-organic chemical vapor deposition using Mo(CO)6 as precursor. Well crystalline thin films could be synthesized only in the case where the precursor vapor was present before deposition temperature was rapidly reached. A reaction scheme is postulated. The formation of benzene from methane over the nano-structured Mo films has been observed in micro-reactor studies and confirms that Mo2C + MoO3 are an active catalyst for methane conversion.",

keywords = "MOCVD, Mo(CO), MoC, Nano-structure, Thin films",

author = "Chen, \{H. Y.\} and L. Chen and Y. Lu and Q. Hong and Chua, \{H. C.\} and Tang, \{S. B.\} and J. Lin",

year = "2004",

doi = "10.1016/j.cattod.2004.06.116",

language = "英语",

volume = "96",

pages = "161--164",

journal = "Catalysis Today",

issn = "0920-5861",

publisher = "Elsevier B.V.",

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}

TY - JOUR

T1 - Synthesis, characterization and application of nano-structured Mo 2C thin films

AU - Chen, H. Y.

AU - Chen, L.

AU - Lu, Y.

AU - Hong, Q.

AU - Chua, H. C.

AU - Tang, S. B.

AU - Lin, J.

PY - 2004

Y1 - 2004

N2 - Nano-structured Mo2C thin films were grown on Si(1 0 0) by metal-organic chemical vapor deposition using Mo(CO)6 as precursor. Well crystalline thin films could be synthesized only in the case where the precursor vapor was present before deposition temperature was rapidly reached. A reaction scheme is postulated. The formation of benzene from methane over the nano-structured Mo films has been observed in micro-reactor studies and confirms that Mo2C + MoO3 are an active catalyst for methane conversion.

AB - Nano-structured Mo2C thin films were grown on Si(1 0 0) by metal-organic chemical vapor deposition using Mo(CO)6 as precursor. Well crystalline thin films could be synthesized only in the case where the precursor vapor was present before deposition temperature was rapidly reached. A reaction scheme is postulated. The formation of benzene from methane over the nano-structured Mo films has been observed in micro-reactor studies and confirms that Mo2C + MoO3 are an active catalyst for methane conversion.

KW - MOCVD

KW - Mo(CO)

KW - MoC

KW - Nano-structure

KW - Thin films

UR - https://www.scopus.com/pages/publications/4544336496

U2 - 10.1016/j.cattod.2004.06.116

DO - 10.1016/j.cattod.2004.06.116

M3 - 会议文章

AN - SCOPUS:4544336496

SN - 0920-5861

VL - 96

SP - 161

EP - 164

JO - Catalysis Today

JF - Catalysis Today

IS - 3

ER -

Synthesis, characterization and application of nano-structured Mo ₂C thin films

Abstract

Keywords

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