Abstract
Cu, Al, and Ti films of ∼ 10 nm thickness were deposited on porous silicon (PS) at room temperature using Filtered Cathodic Vacuum Arc system and annealed at 800°C for 10 min in vacuum. The PS layers were obtained by anodization of Si wafer. X-ray photoelectron spectroscopy, photoluminescence (PL), photo-absorption (PA), and X-ray diffraction studies revealed that before annealing just Cu-deposited sample exhibited PL blueshift, PA redshift, and Si-2p level shift due to the Cu diffusion at the surface of PS. While after annealing, Cu- and Ti-deposited samples exhibited obvious PA redshift and Si-2p level shift, which arise from the crystal field variation due to the formation of Cu/Ti silicides at the surface as well as the conduction electronic transportation.
| Original language | English |
|---|---|
| Pages (from-to) | 265-270 |
| Number of pages | 6 |
| Journal | Surface Review and Letters |
| Volume | 16 |
| Issue number | 2 |
| DOIs | |
| State | Published - Apr 2009 |
| Externally published | Yes |
Keywords
- Crystal field
- Metalization
- Porous silicon
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