Surface birefringence of regular periodic surface structures produced on glass coated with an indium tin oxide film using a low-fluence femtosecond laser through a cylindrical lens

Large-area regular laser-induced periodic surface structures (LIPSSs) with a birefringence effect were efficiently produced on a glass surface coated with an indium tin oxide (ITO) film, through irradiation by a femtosecond laser (800 nm, 50 fs, 3 mJ, 1 kHz) focused with a cylindrical lens. The laser fluence of 0.44 J/cm2 on the coated glass was only one-tenth of that on bare glass, which significantly reduced the thermal effect. Moreover, regular LIPSSs with a period as short as 100 nm could be produced efficiently. The retardance of the fabricated LIPSSs was measured to be up to 44 nm, which is eight times that of LIPSSs fabricated on bare glass. The mechanisms of such a large difference of retardance were studied by measuring the nanostructures and the concentration of In3+ ions on the cross section of nano-corrugated surface layer on bare glass and ITO-coated glass.