Abstract
The crystallization temperature of superlattice-like GaSb/Sb 2Te 3 films can be easily changed by the number of interfaces and thickness ratio between GaSb and Sb 2Te 3 layers. The reset operation can be completed by an electric pulse as short as 20 ns for the GaSb(4 nm)/Sb 2Te 3(6 nm)-based phase-change memory test cell. This test cell exhibited endurance up to 1.4 × 10 4 cycles. The thermal simulation confirmed that the improved performance of superlattice-like GaSb/Sb 2Te 3 films originated from the low thermal conductivity and low melting point.
| Original language | English |
|---|---|
| Pages (from-to) | 702-705 |
| Number of pages | 4 |
| Journal | Scripta Materialia |
| Volume | 66 |
| Issue number | 9 |
| DOIs | |
| State | Published - May 2012 |
| Externally published | Yes |
Keywords
- Electric resistivity
- Multilayers
- Phase change memory
- Simulation