Superlattice-like GaSb/Sb 2Te 3 films for low-power phase change memory

  • Yegang Lu*
  • , Sannian Song
  • , Zhitang Song
  • , Wanchun Ren
  • , Yulin Xiong
  • , Feng Rao
  • , Liangcai Wu
  • , Yan Cheng
  • , Bo Liu
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Abstract

The crystallization temperature of superlattice-like GaSb/Sb 2Te 3 films can be easily changed by the number of interfaces and thickness ratio between GaSb and Sb 2Te 3 layers. The reset operation can be completed by an electric pulse as short as 20 ns for the GaSb(4 nm)/Sb 2Te 3(6 nm)-based phase-change memory test cell. This test cell exhibited endurance up to 1.4 × 10 4 cycles. The thermal simulation confirmed that the improved performance of superlattice-like GaSb/Sb 2Te 3 films originated from the low thermal conductivity and low melting point.

Original languageEnglish
Pages (from-to)702-705
Number of pages4
JournalScripta Materialia
Volume66
Issue number9
DOIs
StatePublished - May 2012
Externally publishedYes

Keywords

  • Electric resistivity
  • Multilayers
  • Phase change memory
  • Simulation

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