Abstract
Spectroscopic ellipsometry is used to measure the optical constants of materials in visible light region because it is the most accurate method for the direct measurement of the optical constants of materials. But it is rarely used in infrared light region to do so. This paper introduces the experimental results of using infrared spectroscopic ellipsometry to measure the refractive index of GaAs bulk material in the infrared light region (2.5-12.5 μm). The experimental data are compared with the theoretical calculating values and the experimental results given by some literatures, showing that this measurement is reliable.
| Original language | English |
|---|---|
| Pages (from-to) | 23-25 |
| Number of pages | 3 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 18 |
| Issue number | 1 |
| State | Published - 1999 |
| Externally published | Yes |