Abstract
This work introduces a novel method for measuring thin film thickness,employing a multi-wavelength method that significantly reduces the need for broad-spectrum data. Unlike traditional techniques that require sev⁃ eral hundred spectral data points,the multi-wavelength method achieves precise thickness measurements with data from only 10 wavelengths. This innovation not only simplifies the process of spectral measurement analysis but al⁃ so enables accurate real-time thickness measurement on industrial coating production lines. The method effective⁃ ly reconstructs and fits the visible spectrum(400-800 nm)using a minimal amount of data,while maintaining measurement error within 7. 1%. This advancement lays the foundation for more practical and efficient thin film thickness determination techniques in various industrial applications.
| Translated title of the contribution | 多波长薄膜厚度检测方法研究 |
|---|---|
| Original language | English |
| Pages (from-to) | 813-819 |
| Number of pages | 7 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 43 |
| Issue number | 6 |
| DOIs | |
| State | Published - Dec 2024 |
| Externally published | Yes |
Keywords
- film thickness determination
- fitting
- spectral reconstruction
- transmittance and reflectance spectra