Study on multi-wavelength thin film thickness determination method

  • Ce Shi
  • , Mao Bin Xie
  • , Wei Bo Zheng
  • , Ruo Nan Ji
  • , Shao Wei Wang*
  • , Wei Lu*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

This work introduces a novel method for measuring thin film thickness,employing a multi-wavelength method that significantly reduces the need for broad-spectrum data. Unlike traditional techniques that require sev⁃ eral hundred spectral data points,the multi-wavelength method achieves precise thickness measurements with data from only 10 wavelengths. This innovation not only simplifies the process of spectral measurement analysis but al⁃ so enables accurate real-time thickness measurement on industrial coating production lines. The method effective⁃ ly reconstructs and fits the visible spectrum(400-800 nm)using a minimal amount of data,while maintaining measurement error within 7. 1%. This advancement lays the foundation for more practical and efficient thin film thickness determination techniques in various industrial applications.

Translated title of the contribution多波长薄膜厚度检测方法研究
Original languageEnglish
Pages (from-to)813-819
Number of pages7
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume43
Issue number6
DOIs
StatePublished - Dec 2024
Externally publishedYes

Keywords

  • film thickness determination
  • fitting
  • spectral reconstruction
  • transmittance and reflectance spectra

Fingerprint

Dive into the research topics of 'Study on multi-wavelength thin film thickness determination method'. Together they form a unique fingerprint.

Cite this