Study on a novel optical readout ferroelectric device based on MIS for uncooled infrared imaging

Both conventional reflectance and electric modulation reflectance of MIS structures: Pt/BLT/Si and Pt/STO/Si are investigated under different bias voltage in visible band. To make the study for a novel type of infrared imaging device with optical readout, we describe theoretically the regularity of bias voltage-induced reflectivity change of MIS using Drude plasmon effect model and employ the electric modulation to enhance the sensitivity and resolution of reflectance spectrum of MIS. To improve the SNR for reflectance measurement, we design a dual-optical-path and dual-modulating experiment instrument. A tandem demodulation technique is adopted with two lock-in amplifiers to achieve precise results. Some more sensitive optical band for optical readout and the voltage value interval causing fastest change rate are found. With the MIS-based research, we bring out the possibility of forming the MFIS device for infrared imaging by attaching a ferroelectric layer PZT to MIS structure. The detecting principle of MFIS device is briefly introduced.