@inproceedings{787d34aa0e7e430babbcd2a5130437fd,
title = "Study of the response behaviour of micromechanical optical modulator with a square wave driving",
abstract = "In this paper we present a micromechanical optical modulator fabricated by surface micromechanical technique. The modulator provides an ideal tool to investigate the dynamic process of the micromechanical device. The modulator has a series of resonant frequencies determined from the device structure. When the modulator is driven by a square wave, the response waveform depends on the driving frequency. When the driving signal is far less than the resonant frequencies, the response is a damping vibration: a response to the up and down step driving. When the driving signal is close to the main intrinsic frequency, the response is a sinusoidal signal: a response to the first frequency component.",
author = "Huibing Mao and Jinghua Ke and Peisheng Xing and Zongsheng Lai",
note = "Publisher Copyright: {\textcopyright} 2001 IEEE.; 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 ; Conference date: 22-10-2001 Through 25-10-2001",
year = "2001",
doi = "10.1109/ICSICT.2001.982004",
language = "英语",
series = "2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "753--756",
editor = "Hiroshi Iwai and Xin-Ping Qu and Bing-Zong Li and Guo-Ping Ru and Paul Yu",
booktitle = "2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings",
address = "美国",
}