Study of the response behaviour of micromechanical optical modulator with a square wave driving

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper we present a micromechanical optical modulator fabricated by surface micromechanical technique. The modulator provides an ideal tool to investigate the dynamic process of the micromechanical device. The modulator has a series of resonant frequencies determined from the device structure. When the modulator is driven by a square wave, the response waveform depends on the driving frequency. When the driving signal is far less than the resonant frequencies, the response is a damping vibration: a response to the up and down step driving. When the driving signal is close to the main intrinsic frequency, the response is a sinusoidal signal: a response to the first frequency component.

Original languageEnglish
Title of host publication2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings
EditorsHiroshi Iwai, Xin-Ping Qu, Bing-Zong Li, Guo-Ping Ru, Paul Yu
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages753-756
Number of pages4
ISBN (Electronic)0780365208, 9780780365209
DOIs
StatePublished - 2001
Event6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Shanghai, China
Duration: 22 Oct 200125 Oct 2001

Publication series

Name2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings
Volume2

Conference

Conference6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001
Country/TerritoryChina
CityShanghai
Period22/10/0125/10/01

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