Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

Kaiyou Qian; Ting Chen; Bingyong Yan; Yangkui Lin; Dong Xu; Zhuo Sun; Bingchu Cai

doi:10.1016/j.physe.2005.07.016

Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

Kaiyou Qian^*
, Ting Chen
, Bingyong Yan
, Yangkui Lin
, Dong Xu
, Zhuo Sun
, Bingchu Cai

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source. The sensor consisted of the anode-sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) arrays cathode in the micro-vacuum chamber. MWNTs were grown on the silicon substrate by thermal CVD. The prototype pressure sensor had measured sensitivity of about 0.35-6.1 nA/Pa (5-550 KPa). The work suggests the potential use of CNTs-based field-emitter in microsensors such as accelerometers and tactile sensors.

Original language	English
Pages (from-to)	1-4
Number of pages	4
Journal	Physica E: Low-Dimensional Systems and Nanostructures
Volume	31
Issue number	1
DOIs	https://doi.org/10.1016/j.physe.2005.07.016
State	Published - Jan 2006

Keywords

Carbon nanotubes
Pressure sensors
Vacuum microelectronics

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10.1016/j.physe.2005.07.016

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abstract = "A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source. The sensor consisted of the anode-sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) arrays cathode in the micro-vacuum chamber. MWNTs were grown on the silicon substrate by thermal CVD. The prototype pressure sensor had measured sensitivity of about 0.35-6.1 nA/Pa (5-550 KPa). The work suggests the potential use of CNTs-based field-emitter in microsensors such as accelerometers and tactile sensors.",

keywords = "Carbon nanotubes, Pressure sensors, Vacuum microelectronics",

author = "Kaiyou Qian and Ting Chen and Bingyong Yan and Yangkui Lin and Dong Xu and Zhuo Sun and Bingchu Cai",

year = "2006",

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doi = "10.1016/j.physe.2005.07.016",

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T1 - Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

AU - Qian, Kaiyou

AU - Chen, Ting

AU - Yan, Bingyong

AU - Lin, Yangkui

AU - Xu, Dong

AU - Sun, Zhuo

AU - Cai, Bingchu

PY - 2006/1

Y1 - 2006/1

N2 - A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source. The sensor consisted of the anode-sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) arrays cathode in the micro-vacuum chamber. MWNTs were grown on the silicon substrate by thermal CVD. The prototype pressure sensor had measured sensitivity of about 0.35-6.1 nA/Pa (5-550 KPa). The work suggests the potential use of CNTs-based field-emitter in microsensors such as accelerometers and tactile sensors.

AB - A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source. The sensor consisted of the anode-sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) arrays cathode in the micro-vacuum chamber. MWNTs were grown on the silicon substrate by thermal CVD. The prototype pressure sensor had measured sensitivity of about 0.35-6.1 nA/Pa (5-550 KPa). The work suggests the potential use of CNTs-based field-emitter in microsensors such as accelerometers and tactile sensors.

KW - Carbon nanotubes

KW - Pressure sensors

KW - Vacuum microelectronics

UR - https://www.scopus.com/pages/publications/29644433835

U2 - 10.1016/j.physe.2005.07.016

DO - 10.1016/j.physe.2005.07.016

M3 - 文章

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SN - 1386-9477

VL - 31

SP - 1

EP - 4

JO - Physica E: Low-Dimensional Systems and Nanostructures

JF - Physica E: Low-Dimensional Systems and Nanostructures

IS - 1

ER -

Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

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Keywords

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