Structure investigation on Hg1-xCdxTe liquid phase epitaxial films grown by the meltetch technique

Biao Li, Y. S. Gui, J. Q. Zhu, J. H. Chu

Research output: Contribution to journalArticlepeer-review

Abstract

Hg1-xCdxTe films were grown by a modified meltetch liquid phase epitaxial (LPE) technique which includes both substrate and epilayer etchback steps. The crystal quality of epilayer has been investigated by means of transmission electron microscopy, scanning electron microscopy, and double crystal x-ray diffraction. It has been found that adequate meltetch of the substrate at the beginning of LPE provides a fresh and flat surface for epitaxial growth, while epilayer meltetch at the end of LPE may prevent spurious melt sticking.

Original languageEnglish
Pages (from-to)51-54
Number of pages4
JournalJournal of Electronic Materials
Volume27
Issue number2
DOIs
StatePublished - Feb 1998
Externally publishedYes

Keywords

  • HgCdTe
  • Liquid phase epitaxy (LPE)
  • Meltetch
  • Structure

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