Abstract
Hg1-xCdxTe films were grown by a modified meltetch liquid phase epitaxial (LPE) technique which includes both substrate and epilayer etchback steps. The crystal quality of epilayer has been investigated by means of transmission electron microscopy, scanning electron microscopy, and double crystal x-ray diffraction. It has been found that adequate meltetch of the substrate at the beginning of LPE provides a fresh and flat surface for epitaxial growth, while epilayer meltetch at the end of LPE may prevent spurious melt sticking.
| Original language | English |
|---|---|
| Pages (from-to) | 51-54 |
| Number of pages | 4 |
| Journal | Journal of Electronic Materials |
| Volume | 27 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 1998 |
| Externally published | Yes |
Keywords
- HgCdTe
- Liquid phase epitaxy (LPE)
- Meltetch
- Structure