Abstract
La0.5Sr0.5CoO3 (LSCO) thin films were deposited on Si substrate by metalorganic chemical liquid deposition (MOCLD). PbZr0.5Ti0.5O3 (PZT) were deposited on LSCO thin films by sol-gel process. X-ray diffraction investigation shows that PZT/LSCO multilayer thin films are polycrystalline with preperential (110) -orientation and contain perovskite phase only. The grain diameter of PZT was estimated to be about 50-80 nm by Scherrer's equation. Atomic force microscopy measurement shows that the films have smooth surface with RMS<5 nm. Raman spectrum was used to study the structural property of PZT/LSCO thin films. The optical properties of the films were measured by spectroscopic ellipsometry in the wavelength range of 400-1700 nm. Lorentz model was used to express the optical properties of PZT and LSCO thin films. Optical constants (refractive index n and extinction coefficient k) of the PZT and LSCO films were obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 23-26 |
| Number of pages | 4 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 22 |
| Issue number | 1 |
| State | Published - Feb 2003 |
| Externally published | Yes |
Keywords
- Chemical solution routes
- Ferroelectric multilayer thin films
- Optical constant spectra
- Spectroscopic ellipsometry