@inproceedings{fb11fa9bc7e0402c9169cbd31dafb6bd,
title = "Stability of Sb2Te crystalline films for phase change memory",
abstract = "Stability is one of the most important criterions to judge the quality of products, especially for the phase-change memory (PCM), which is regarded as the most promising candidate for next-generation non-volatile memory. Due to the lack of resistance stability, read errors can occur easily and the reliability of PCM will be influenced. Using Sb2Te as a base material, the resistance stability of Sb2Te was studied, and the results indicated that in the whole cooling process, the resistance of Sb2Te crystalline film was extremely steady under different annealing temperatures and different cooling rates. To unravel the reason why the resistance of Sb2Te crystalline film has good stability, further study was carried out and the results showed that there was no new diffraction peak in the XRD pattern, and the HRTEM images showed the similar hexagonal phase for the films under different annealing temperatures. Moreover, it was observed that the resistance in Sb2Te-based PCM device was still stable for crystalline state and amorphous state. These results revealed that the stability of Sb2Te crystalline films at a micro level and the stability of microscopic structure resulted in the stability of resistance. Therefore, based on the present study, the stability of phase-change material Sb2Te can be applied to exploit more reliable PCM for near-future application.",
keywords = "Crystalline, Phase change memory (PCM), Phase-change material, SbTe, Stability, Structure",
author = "Liu, \{Guang Yu\} and Wu, \{Liang Cai\} and Song, \{Zhi Tang\} and Feng Rao and Song, \{San Nian\} and Yan Cheng",
note = "Publisher Copyright: {\textcopyright} 2017 Trans Tech Publications, Switzerland.; 17th IUMRS International Conference in Asia, IUMRS-ICA 2016 ; Conference date: 20-10-2016 Through 24-10-2016",
year = "2017",
doi = "10.4028/www.scientific.net/MSF.898.1829",
language = "英语",
isbn = "9783035711516",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "1829--1833",
editor = "Yafang Han and Baiqing Xiong and Jun Zhang and Xuefeng Liu and Xuefeng Liu and Jijun Zhao and Runhua Fan and Zuoren Nie and Meifang Zhu",
booktitle = "IUMRS International Conference in Asia - IUMRS-ICA 2016",
address = "瑞士",
}