Spectroscopic-ellipsometry characterization of the interface layer of PbZr0.40Ti0.60O3/LaNiO3/Pt multilayer thin films

Z. G. Hu; Z. M. Huang; Y. N. Wu; G. S. Wang; X. J. Meng; F. W. Shi; J. H. Chu

doi:10.1116/1.1761160

Spectroscopic-ellipsometry characterization of the interface layer of PbZr_0.40Ti_0.60O₃/LaNiO₃/Pt multilayer thin films

Z. G. Hu, Z. M. Huang, Y. N. Wu, G. S. Wang, X. J. Meng, F. W. Shi, J. H. Chu

CAS - Shanghai Institute of Technical Physics

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The optical properties of the PbZr_0.40Ti_0.60O ₃ (PZT) thin films, LaNiO₃ thin films, and the interface layers between them were investigated using spectroscopic-ellipsometry. A parametrized Lorentz oscillator model was used to calculate the PZT, LaNiO ₃, and interface-layer optical constants in the wavelength range of 400-1700 nm. It was observed that the shapes of the optical constants are different for the three different layers because the fitted values of the model parameters are markedly different. It was also found that the PZT films are entirely transparent in the 400-1700nm wavelength region.

Original language	English
Pages (from-to)	1152-1157
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	22
Issue number	4
DOIs	https://doi.org/10.1116/1.1761160
State	Published - Jul 2004
Externally published	Yes

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title = "Spectroscopic-ellipsometry characterization of the interface layer of PbZr0.40Ti0.60O3/LaNiO3/Pt multilayer thin films",

abstract = "The optical properties of the PbZr0.40Ti0.60O 3 (PZT) thin films, LaNiO3 thin films, and the interface layers between them were investigated using spectroscopic-ellipsometry. A parametrized Lorentz oscillator model was used to calculate the PZT, LaNiO 3, and interface-layer optical constants in the wavelength range of 400-1700 nm. It was observed that the shapes of the optical constants are different for the three different layers because the fitted values of the model parameters are markedly different. It was also found that the PZT films are entirely transparent in the 400-1700nm wavelength region.",

author = "Hu, \{Z. G.\} and Huang, \{Z. M.\} and Wu, \{Y. N.\} and Wang, \{G. S.\} and Meng, \{X. J.\} and Shi, \{F. W.\} and Chu, \{J. H.\}",

year = "2004",

month = jul,

doi = "10.1116/1.1761160",

language = "英语",

volume = "22",

pages = "1152--1157",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

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T1 - Spectroscopic-ellipsometry characterization of the interface layer of PbZr0.40Ti0.60O3/LaNiO3/Pt multilayer thin films

AU - Hu, Z. G.

AU - Huang, Z. M.

AU - Wu, Y. N.

AU - Wang, G. S.

AU - Meng, X. J.

AU - Shi, F. W.

AU - Chu, J. H.

PY - 2004/7

Y1 - 2004/7

N2 - The optical properties of the PbZr0.40Ti0.60O 3 (PZT) thin films, LaNiO3 thin films, and the interface layers between them were investigated using spectroscopic-ellipsometry. A parametrized Lorentz oscillator model was used to calculate the PZT, LaNiO 3, and interface-layer optical constants in the wavelength range of 400-1700 nm. It was observed that the shapes of the optical constants are different for the three different layers because the fitted values of the model parameters are markedly different. It was also found that the PZT films are entirely transparent in the 400-1700nm wavelength region.

AB - The optical properties of the PbZr0.40Ti0.60O 3 (PZT) thin films, LaNiO3 thin films, and the interface layers between them were investigated using spectroscopic-ellipsometry. A parametrized Lorentz oscillator model was used to calculate the PZT, LaNiO 3, and interface-layer optical constants in the wavelength range of 400-1700 nm. It was observed that the shapes of the optical constants are different for the three different layers because the fitted values of the model parameters are markedly different. It was also found that the PZT films are entirely transparent in the 400-1700nm wavelength region.

UR - https://www.scopus.com/pages/publications/4344579070

U2 - 10.1116/1.1761160

DO - 10.1116/1.1761160

M3 - 文章

AN - SCOPUS:4344579070

SN - 0734-2101

VL - 22

SP - 1152

EP - 1157

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Spectroscopic-ellipsometry characterization of the interface layer of PbZr_0.40Ti_0.60O₃/LaNiO₃/Pt multilayer thin films

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