Abstract
Cubic heteroepitaxial (001) SrMnO3-δ (SMO) films were grown on SrTiO3 substrates by atomic alternating layer molecular beam epitaxy. Precise control of cation stoichiometry was achieved by in situ reflection high-energy electron diffraction (RHEED) oscillation. During SMO film growth, a correlation between RHEED oscillation features and the cation stoichiometry/monolayer dose was established. In non-stoichiometric films, there were out-of-plane lattice expansions due to off-stoichiometry-dependent defects, including Ruddlesden-Popper SrO planar faults in Sr-rich films and Sr vacancy defect clusters in Mn-rich films.
| Original language | English |
|---|---|
| Article number | 232903 |
| Journal | Applied Physics Letters |
| Volume | 118 |
| Issue number | 23 |
| DOIs | |
| State | Published - 7 Jun 2021 |