Specific cation stoichiometry control of SrMnO3-δ thin films via RHEED oscillations

Qingqing Liu, Qilan Zhong, Jiawei Bai, Jing Yang, Rong Huang, Wei Bai, Yuanyuan Zhang, Chun Gang Duan, Xiaodong Tang

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Cubic heteroepitaxial (001) SrMnO3-δ (SMO) films were grown on SrTiO3 substrates by atomic alternating layer molecular beam epitaxy. Precise control of cation stoichiometry was achieved by in situ reflection high-energy electron diffraction (RHEED) oscillation. During SMO film growth, a correlation between RHEED oscillation features and the cation stoichiometry/monolayer dose was established. In non-stoichiometric films, there were out-of-plane lattice expansions due to off-stoichiometry-dependent defects, including Ruddlesden-Popper SrO planar faults in Sr-rich films and Sr vacancy defect clusters in Mn-rich films.

Original languageEnglish
Article number232903
JournalApplied Physics Letters
Volume118
Issue number23
DOIs
StatePublished - 7 Jun 2021

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