Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications

Jian Gong Cheng; Jun Tang; Jun Hao Chu

doi:10.1117/12.451911

Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications

Jian Gong Cheng, Jun Tang, Jun Hao Chu

Research output: Contribution to journal › Conference article › peer-review

Abstract

Columnar Ba_0.8Sr_0.2TiO₃ films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1×10^-4 C/m²K at room temperature. and a leakage current of 1.42×10^-7A/cm² under 100 kV/cm electrical field. The Ba_0.8Sr_0.2TiO₃ films have been used for fabricating a 1×16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500×300 μm² have a detectivity of 2.3×10⁸ cmHz1^1/2W^-1 at 23°C and 35Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba_0.8Sr_0.2TiO₃ films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.

Original language	English
Pages (from-to)	100-106
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4795
DOIs	https://doi.org/10.1117/12.451911
State	Published - 2002
Externally published	Yes
Event	Materials for Infrared Detectors II - Seattle, WA, United States Duration: 8 Jul 2002 → 9 Jul 2002

Keywords

BaSrTiO
Pyroelectric properties
Sol-gel
Uncooled infrared detector arrays

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10.1117/12.451911

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@article{d59bc57e8d624521829985b1de7f1ac1,

title = "Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications",

abstract = "Columnar Ba0.8Sr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1×10-4 C/m2K at room temperature. and a leakage current of 1.42×10-7A/cm2 under 100 kV/cm electrical field. The Ba0.8Sr0.2TiO3 films have been used for fabricating a 1×16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500×300 μm2 have a detectivity of 2.3×108 cmHz11/2W-1 at 23°C and 35Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8Sr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.",

keywords = "BaSrTiO, Pyroelectric properties, Sol-gel, Uncooled infrared detector arrays",

author = "Cheng, \{Jian Gong\} and Jun Tang and Chu, \{Jun Hao\}",

year = "2002",

doi = "10.1117/12.451911",

language = "英语",

volume = "4795",

pages = "100--106",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Materials for Infrared Detectors II ; Conference date: 08-07-2002 Through 09-07-2002",

}

TY - JOUR

T1 - Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications

AU - Cheng, Jian Gong

AU - Tang, Jun

AU - Chu, Jun Hao

PY - 2002

Y1 - 2002

N2 - Columnar Ba0.8Sr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1×10-4 C/m2K at room temperature. and a leakage current of 1.42×10-7A/cm2 under 100 kV/cm electrical field. The Ba0.8Sr0.2TiO3 films have been used for fabricating a 1×16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500×300 μm2 have a detectivity of 2.3×108 cmHz11/2W-1 at 23°C and 35Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8Sr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.

AB - Columnar Ba0.8Sr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1×10-4 C/m2K at room temperature. and a leakage current of 1.42×10-7A/cm2 under 100 kV/cm electrical field. The Ba0.8Sr0.2TiO3 films have been used for fabricating a 1×16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500×300 μm2 have a detectivity of 2.3×108 cmHz11/2W-1 at 23°C and 35Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8Sr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.

KW - BaSrTiO

KW - Pyroelectric properties

KW - Sol-gel

KW - Uncooled infrared detector arrays

UR - https://www.scopus.com/pages/publications/0036989452

U2 - 10.1117/12.451911

DO - 10.1117/12.451911

M3 - 会议文章

AN - SCOPUS:0036989452

SN - 0277-786X

VL - 4795

SP - 100

EP - 106

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Materials for Infrared Detectors II

Y2 - 8 July 2002 through 9 July 2002

ER -

Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications

Abstract

Keywords

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